Substrate transfer robot

TW202633341APending Publication Date: 2026-08-01KAWASAKI JUKOGYO KK
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
KAWASAKI JUKOGYO KK
Filing Date
2025-10-08
Publication Date
2026-08-01

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Abstract

The substrate transfer robot of this invention includes a hand, a fixed support unit, a movable support unit, a drive unit, a force sensor, and a control unit. The fixed support unit abuts against a workpiece held by the hand. The movable support unit, together with the fixed support unit, clamps and holds the workpiece in the hand. The drive unit moves the movable support unit. The force sensor detects the force applied to the movable support unit. The control unit controls the movement of the movable support unit by the drive unit based on the detection results of the force sensor.
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