Transport device

Abstract

[Problem] This disclosure provides a transport device for moving substrates into and out of a processing apparatus for processing substrates. [Solution] A transport device for moving substrates into and out of a processing apparatus for processing substrates includes: a loading port for holding a container that houses the substrate; a main body having: a first opening disposed in a front wall corresponding to the container on the side wall of the loading port; a second opening disposed in a rear wall on the side wall of the processing apparatus; a transport robot for transporting the substrate between the first opening and the second opening; a fan filter unit for supplying filtered particulate gas from above to below the transport space housing the transport robot; and a lower receiving portion disposed below the loading port; the transport robot having a horizontal arm configured to transport the substrate in a horizontal direction, wherein the standby position of the transport robot formed by the upper end of the horizontal arm is lower than the lower end positions of the first and second openings.

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