Semiconductor manufacturing system, substrate standby module and substrate processing method

Abstract

A semiconductor manufacturing system is provided that suppresses the expansion of the footprint and allows processing to be performed along the substrate transport path. The semiconductor manufacturing system includes: a transport module for transporting substrates; and a substrate standby module connected to the transport module and temporarily suspending the substrates transported by the transport module. The substrate standby module comprises: a container body having an internal space for accommodating the substrate; a gas exhaust section capable of drawing gas from the internal space to create a vacuum atmosphere; a movable partition member disposed vertically within the internal space and capable of vertically separating the internal space through contact with the wall of the container body; and a substrate processing section for performing substrate processing on the substrate housed in one of the two spaces separated by the movable partition member.

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