Substrate transport apparatus, substrate transport method and computer memory medium

Abstract

[Problem] To transport a substrate to a target position with high precision. [Solution] A substrate transport device is provided, which is disposed in a housing common to a heat treatment unit that performs heat treatment on a substrate. The substrate is transported to a rotating processing unit that holds and rotates the substrate for processing. The device includes a transport arm that supports and moves the substrate, and a control unit that controls the movement of the transport arm. When the processing temperature setting of the heat treatment unit is changed, the control unit obtains a correction amount for the receiving position of the transport arm when the rotating processing unit receives the substrate. The control unit determines the correction direction of the receiving position based on the elapsed time since the setting was changed, and adjusts the receiving position based on the correction amount obtained and the correction direction determined.

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