Substrate processing apparatus and method of controlling substrate processing apparatus

Abstract

The object of this invention is to provide a simple technique for moving a substrate into and out of a processing chamber using a first hand and a second hand. The substrate processing apparatus of this invention includes a processing unit (drying processing unit 30) and a conveying unit (partial conveying unit 22). The conveying unit includes: an end effector 230, which includes a first hand 231 and a second hand 232; and a hand movement drive unit 24, which moves the end effector 230 horizontally. A first lifting drive unit (pin lifting drive unit 341) moves a first support member (a plurality of lifting pins 34) to each of the following height positions: a first contact portion of the first support member that contacts the lower surface of the substrate W at a first height position H31 above the first hand 231; a second height position H32 where the first contact portion is located between the first hand 231 and the second hand 232; and a third height position H33 where the first contact portion is located below the second hand 232.

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