Apparatus and method for transferring substrate

TW202633349APending Publication Date: 2026-08-01ABSOLICS INC
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ABSOLICS INC
Filing Date
2025-12-17
Publication Date
2026-08-01

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Abstract

The present invention relates to a substrate transfer apparatus and method, and the substrate transfer apparatus according to one aspect of the present invention includes a lower stage that supports a lower surface of a substrate and moves the substrate upward, and an upper stage that suctions an upper surface of the substrate moved upward by the lower stage and inverts the substrate.
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