Bonding apparatus, bonding method, and article manufacturing method

Abstract

A bonding apparatus for bonding a second member to a first member, includes a first holder configured to hold the first member, a second holder configured to hold the second member, a positioning mechanism configured to adjust a relative position between the first holder and the second holder, a first camera configured to capture the first member, a second camera held by the first holder and configured to capture the second member, and a controller configured to control, based on an output of the first camera, an output of the second camera, and an operation history of the bonding apparatus, the positioning mechanism so as to position the second member to a bonding target location of the first member.

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