Substrate support

TW202633365APending Publication Date: 2026-08-01ASML NETHERLANDS BV
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ASML NETHERLANDS BV
Filing Date
2025-10-27
Publication Date
2026-08-01

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Abstract

A substrate support configured to support a substrate. The substrate support, comprises a main body. The main body has a first side configured to support the substrate, and a second side opposite to the first side. A plurality of grooves is formed in the main body. The plurality of grooves comprises a first groove and a second groove longer than the first groove. The first groove is configured to impede a flow of fluid through the first groove in a first direction and to allow the flow of fluid through the first groove in a second direction, opposing the first direction.
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