Flipping device and substrate processing equipment

Abstract

A flipping device and a substrate processing apparatus are disclosed. The flipping device includes a flipping unit comprising a flipping drive source and a flipping shaft, the flipping shaft being disposed at the output end of the flipping drive source; a clamping unit for clamping a substrate, connected to the flipping shaft, the clamping unit including two first clamping mechanisms and two second clamping mechanisms, the two first clamping mechanisms and the two second clamping mechanisms forming an accommodating space for accommodating the substrate, the substrate being configured to enter the accommodating space from the outside; the two second clamping mechanisms are disposed closer to the outside than the two first clamping mechanisms; the two first clamping mechanisms are used to support the substrate during the process of the clamping unit being driven by the flipping unit to flip around the axis of the flipping shaft, and are also used to be driven to rotate around their own rotation axis to clamp or release the substrate; the two second clamping mechanisms are fixedly disposed for clamping the substrate.

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