Load lock arrangement comprising a microwave heater for desorbing moisture and substrate processing apparatus

TW202633371APending Publication Date: 2026-08-01ASM IP HLDG BV
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ASM IP HLDG BV
Filing Date
2025-12-12
Publication Date
2026-08-01

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Abstract

This disclosure relates to a load lock arrangement and a substrate processing apparatus comprising the load lock arrangement. The load lock arrangement comprises a load lock chamber body that defines a load lock chamber, a substrate holder for holding one or more substrates in the load lock chamber, and a microwave heater for desorbing adsorbed moisture from the one or more substrates.
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