Susceptor leveling assembly, semiconductor apparatus, and reactor system

TW202633372APending Publication Date: 2026-08-01ASM IP HLDG BV
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
ASM IP HLDG BV
Filing Date
2025-12-15
Publication Date
2026-08-01

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Abstract

Apparatus and systems suitable for leveling a susceptor are disclosed. An exemplary susceptor leveling assembly comprises a susceptor leveler plate and a first positioning assembly, wherein the first positioning assembly comprises a first positioning device and a first leveling mechanism. An exemplary apparatus includes a pedestal and a susceptor leveling assembly. An exemplary reactor system includes a susceptor, a pedestal, and a susceptor leveling assembly.
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