An article configured for receiving an object for high temperature processing and a method of manufacturing said article
TW202633373APending Publication Date: 2026-08-01SCHUNK XYCARB TECH BV
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- SCHUNK XYCARB TECH BV
- Filing Date
- 2025-12-17
- Publication Date
- 2026-08-01
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Abstract
The disclosure pertains to article and a method of manufacturing said article. The article is configured for receiving an object for thermal processing, preferably said object being a semiconductor wafer, wherein the article comprises a porous structure having an internal arrangement corresponding to a fibrous material, said article material being silicon carbide (SiC).
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