electrostatic chuck

Abstract

The electrostatic chuck of the present invention comprises: a dielectric member configured as a support substrate and including a first upper surface and an annular sealing strip, the sealing strip having a second upper surface that is higher than the first upper surface; a first electrostatic electrode disposed below the first upper surface within the dielectric member; and a second electrostatic electrode disposed below the second upper surface within the dielectric member and electrically connected to the first electrostatic electrode, wherein a first vertical distance between the second upper surface and the second electrostatic electrode is less than a second vertical distance between a first horizontal plane including the first electrostatic electrode and the second upper surface, and greater than a third vertical distance between a second horizontal plane including the first upper surface and the second upper surface, and the inner end of the second electrostatic electrode is located further outward than the inner end of the sealing strip.

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