Semiconductor processing device

Abstract

The purpose of this disclosure is to provide a semiconductor processing apparatus that can simultaneously achieve high-speed sample exchange and low-vibration wafer handling robot. The semiconductor processing apparatus disclosed herein performs: a first operation of unloading a sample from a platform; a second operation of loading a sample onto the platform; at least a portion of the first operation and at least a portion of the second operation are performed in parallel; the second operation ends before the first operation ends.

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