Bottle containment device and bottle containment method

TW202633397APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-10-07
Publication Date
2026-08-01

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Abstract

[Problem] To reduce the workload of operators when handling bottles containing processing fluid. [Solution] A bottle holder is provided for holding bottles containing processing fluid for manufacturing semiconductor devices; and a switching mechanism is provided for switching between a first state in which the space surrounding the bottle holder is closed, and a second state in which the space is open for handling the bottles. Since the first and second states are switched by the switching mechanism, the workload of operators can be reduced when handling bottles in the second state.
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