Information processing methods, experimental methods and computer programs

Abstract

This invention provides an information processing method, experimental method, and computer program that can reduce the number of experiments in experiments used to model a substrate processing device. In the information processing method of this invention, a control object model is obtained, which includes a plurality of control objects in the substrate processing device, and each control object interacts with a subset of other control objects; a plurality of control contents to be performed on the control objects for conducting experiments in the substrate processing device are obtained; the plurality of control objects contained in the control object model are classified into a plurality of groups according to specific conditions; and a plurality of experimental conditions are created by creating a plurality of combinations of assigning different control contents to each of the plurality of groups.

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