Computer programs, information processing methods and information processing devices

Abstract

This invention provides a computer program, information processing method, and information processing apparatus that can be expected to support users of a substrate processing device. The computer program of this embodiment causes a computer to perform the following processing: acquiring fault information related to a fault in the substrate processing device and log information output by the substrate processing device that has performed substrate processing; based on the acquired fault information and log information, generating response information related to countermeasures for the fault using a language model that stores information related to the substrate processing device; and outputting the generated response information.

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