Computer programs, information processing methods, methods for generating learning data, methods for generating learning models, and information processing devices.

TW202633408APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-09-15
Publication Date
2026-08-01

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Abstract

This invention provides a computer program, an information processing method, a method for generating learning data, a method for generating a learning model, and an information processing apparatus, which are expected to support measures for dealing with particles generated within a container of a substrate processing apparatus. The computer program of this embodiment causes a computer to perform the following processing: acquiring particle data, the particle data including position information of particles generated within the processing container of the substrate processing apparatus; inputting the acquired particle data into a first learning model, the first learning model having undergone machine learning in a manner that accepts the particle data as input and outputs information related to a particle recycling method; acquiring the recycling method-related information output by the first learning model; and outputting the acquired recycling method-related information.
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