Computer programs, information processing methods, methods for generating learning data, methods for generating learning models, and information processing devices.
TW202633408APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2025-09-15
- Publication Date
- 2026-08-01
Smart Images

Figure TWG2TA001070418_001 
Figure TWG2TA001070418_002 
Figure TWG2TA001070418_003
Abstract
This invention provides a computer program, an information processing method, a method for generating learning data, a method for generating a learning model, and an information processing apparatus, which are expected to support measures for dealing with particles generated within a container of a substrate processing apparatus. The computer program of this embodiment causes a computer to perform the following processing: acquiring particle data, the particle data including position information of particles generated within the processing container of the substrate processing apparatus; inputting the acquired particle data into a first learning model, the first learning model having undergone machine learning in a manner that accepts the particle data as input and outputs information related to a particle recycling method; acquiring the recycling method-related information output by the first learning model; and outputting the acquired recycling method-related information.
Need to check novelty before this filing date? Find Prior Art