Information processing methods, information processing devices and computer programs

TW202633411APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-09-26
Publication Date
2026-08-01

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Abstract

This invention provides an information processing method, an information processing apparatus, and a computer program. The invention involves a computer performing the following processing: receiving a user's inquiry regarding substrate processing; generating a response text for the received user's inquiry using a language model referencing process data and literature related to substrate processing; and outputting the generated response text.
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