Charging system, container and charging method

Abstract

[Problem] This invention aims to provide a technology that enables a substrate-type sensor to operate stably by charging at appropriate times. [Solution] A charging system includes: a plurality of substrate processing systems, a container, a conveying system, a workstation, and a control unit. The container has a sensor capable of detecting information related to whether the substrate-type sensor can be conveyed to the substrate processing system. When the container detects that the substrate-type sensor cannot be conveyed, it charges the substrate-type sensor from a battery; when it detects that the substrate-type sensor can be conveyed, it stops charging the substrate-type sensor from the battery. When the control unit determines that a battery replacement or charging is required, it controls the conveying system to convey the container to the workstation; when it determines that a battery replacement or charging is not required, it controls the conveying system to convey the container to any one of the plurality of substrate processing systems.

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