Semiconductor test device and semiconductor test system

Abstract

This invention relates to semiconductor testing apparatus and semiconductor testing system. According to one embodiment of the invention, a semiconductor testing apparatus is used to test the electrical connections of a semiconductor. The apparatus includes a film portion having a plurality of opening patterns facing a first surface and a second surface opposite to the first surface. The film portion includes: a metal thin film portion having the plurality of opening patterns; and an insulating layer portion formed by coating an insulating material onto the surface of the first metal thin film portion. Adjacent opening patterns are insulated from each other. Each opening pattern has at least one conductive thin film layer formed on its side surface to form an electrical connection path from top to bottom. The upper part of the film portion further includes a bump guide portion having a plurality of openings corresponding to the opening patterns.

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