Flexible heatsink interface
TW202633450APending Publication Date: 2026-08-01APPLIED MATERIALS INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-10-13
- Publication Date
- 2026-08-01
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Abstract
Multi-die packages may include a cover or lid that is placed over vertical stacks of silicon dies. This lid connects to a cooling system or heatsink to dissipate heat away from the dies. However, as thermal expansion / contraction occurs, the dies may lose contact with the cover and heat may build up within the cover around the dies. To solve this problem, a cover may include a flexible membrane on the bottom surface of the cover. The flexible membrane may create an internal cavity filled with a pressurized thermally conductive liquid. The liquid may cause the flexible membrane to expand and conform to a profile of the dies as they move due to temperature changes. The flexible membrane ensures that a thermally conductive pathway is maintained between the cover and the dies to effectively dissipate heat away from the dies.
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