Apparatus for flow distribution, reactor, and system for flow distribution

TW202634107APending Publication Date: 2026-08-16ASM IP HLDG BV
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Patent Information

Application Number
TW114142281
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-05
Filing Date
2025-10-31
Publication Date
2026-08-16

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Abstract

Various embodiments of the present technology may provide a spacer plate with a groove and an inlet aperture in fluid communication with the groove, a flow distribution ring disposed within the groove, wherein the flow distribution ring has a plurality of apertures, and a top ring disposed above the spacer plate and the flow distribution ring.
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