Electrical contacts, systems, and methods for electroplating
TW202634131APending Publication Date: 2026-08-16LAM RES CORP
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Patent Information
- Application Number
- TW114132159
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-07
- Filing Date
- 2025-08-22
- Publication Date
- 2026-08-16
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Abstract
Electrical contact apparatuses, systems, and techniques for electroplating are provided. The electrical contact apparatus may have a body portion extending around a center axis, and a plurality of electrical contact fingers arranged in a substantially equally spaced manner around the center axis and extending in a radial direction inwards towards the center axis. Each electrical contact finger may be flexible in a direction parallel to the center axis, may have a proximal portion connected to the body portion, and has a distal portion connected to the proximal portion and forming an included angle with the proximal portion that is between about
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