Electrical contacts, systems, and methods for electroplating

TW202634131APending Publication Date: 2026-08-16LAM RES CORP
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Patent Information

Application Number
TW114132159
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-07
Filing Date
2025-08-22
Publication Date
2026-08-16

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Abstract

Electrical contact apparatuses, systems, and techniques for electroplating are provided. The electrical contact apparatus may have a body portion extending around a center axis, and a plurality of electrical contact fingers arranged in a substantially equally spaced manner around the center axis and extending in a radial direction inwards towards the center axis. Each electrical contact finger may be flexible in a direction parallel to the center axis, may have a proximal portion connected to the body portion, and has a distal portion connected to the proximal portion and forming an included angle with the proximal portion that is between about
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