Reverse-action magnetic sensing structure

Abstract

The present invention provides a reverse-action magnetic sensing structure comprising: an outer frame; a first support unit; a first motion module comprising: a first motion unit, a first connection unit, a second motion unit, a second connection unit, a second support unit, a second motion unit, a second motion module comprising: a third motion unit, a third connection unit, a fourth motion unit, a fourth connection unit, a third support unit, a first motion unit, and a second motion unit. The structure of the present invention enables the first moving unit, the second moving unit, the third moving unit and the fourth moving unit to move according to the external magnetic field, so that the first moving unit, the second moving unit, the third moving unit and the fourth moving unit can obtain displacement according to the change of the capacitance value of the first finger capacitor and the second finger capacitor, and thus obtain the strength of the magnetic field.

Description

[Technical Field]

[0001] The present invention relates to a magnetic sensing structure that operates in the opposite direction, and more particularly to a magnetic sensing structure that can extend the sensing range with a similar structure and operate in the opposite direction. [Previous Technology]

[0002] An inertial measurement unit is an electronic component that captures information about the motion of an object and measures its attitude. It is also known as an inertial sensor and is mainly composed of a gyroscope and an accelerometer. In some applications, a magnetometer and a barometer are sometimes added to help estimate relevant information. It is often used in vehicle navigation. Among them, the magnetometer can be used to test the strength and direction of the magnetic field and locate the position of the device. The principle of the magnetometer is similar to that of the compass, and it can measure the angle between the current device and the four cardinal directions.

[0003] The most commonly used magnetometer in daily life is the Lorentz magnetometer. The Lorentz magnetometer is currently a relatively simple and accurate magnetometer. It works by applying a current to the main mass block, which causes the mass block to generate a Lorentz force in a magnetic environment due to the current contained within it. This causes the main mass block to vibrate within its own range, and the strength and direction of the magnetic field can be determined by the displacement and acceleration of the vibration.

[0004] However, the current method of magnetometer measurement is mostly to fix the capacitance of one mass block and calculate the magnitude of the magnetic force contained in the environment by the vibration displacement of the other mass block. Therefore, the relative displacement generated by the two mass blocks is closely related to the sensed magnetic force. Since the displacement of the two mass blocks is usually in micrometers, if the relative displacement generated by the two mass blocks can be increased, not only will the accuracy of magnetic field sensing be improved, but the measurement error will also be smaller.

[0005] Since magnetometers are mostly used for electronic components, they do not occupy much space. Directly increasing the displacement of the mass block is not ideal. Therefore, if two mass blocks are vibrated simultaneously and controlled to move in opposite directions, thereby increasing their relative displacement, the magnitude of the magnetic force contained in the environment can be calculated, and the relative displacement of the entire mass block can be doubled. This can significantly improve the accuracy of sensing the magnetic field.

[0006] To this end, a Lorentz force magnetometer is provided that can specify the force at a specific location of the structure through the driving current and thereby control the two capacitors to operate in opposite directions, which is a problem that those skilled in the art want to solve. [Summary of the Invention]

[0007] One objective of this invention is to provide a magnetic sensing structure with reverse actuation, which, by passing currents in different directions to a first moving member and a second moving member, causes the first moving member and the second moving member to move with a phase difference of 180 degrees, allowing the finger capacitors between them to have a greater relative displacement, thereby achieving the purpose of accurately measuring the magnetic field.

[0008] To achieve the above objectives, the present invention provides a reverse-acting magnetic sensing structure for sensing an external magnetic field. The reverse-acting magnetic sensing structure includes: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; a first moving member disposed on one side of the first support member, the first moving member being connected to the first support member by at least one second flexible member; a first connecting member disposed on one side of the first moving member, the first connecting member being connected to the first moving member by a third flexible member, and the first connecting member being connected to the outer frame by a fourth flexible member; and a second moving member disposed on one side of the first connecting member, the second moving member being connected to the first connecting member by a fifth flexible member. A first finger-shaped capacitor is sandwiched between the first moving component and the first moving component; a second connecting component is disposed on one side of the second moving component, the second connecting component is connected to the second moving component by a sixth flexible component, the second connecting component is connected to the outer frame by a seventh flexible component, and the second connecting component is connected to the first moving component by an eighth flexible component; and a second support component is disposed on the other side of the outer frame, the second support component is connected to the second moving component by at least a ninth flexible component, and the second support component is connected to the outer frame by at least a tenth flexible component; wherein, the first moving component is supplied with a first current, and the second moving component is supplied with a second current, thereby achieving the effect of specifying the force at a specific position of the structure through the driving current, thereby controlling the two capacitors to perform opposite actions, and thereby sensing the surrounding environmental magnetic field.

[0009] The present invention provides an embodiment in which the first current and the second current have opposite current directions.

[0010] The present invention provides an embodiment in which the first moving member drives the first finger capacitor of the portion to generate a first movement based on the external magnetic field and the first current, and the second moving member drives the first finger capacitor of the portion to generate a second movement based on the external magnetic field and the second current.

[0011] The present invention provides an embodiment in which the phase difference between the first motion and the second motion is 180 degrees.

[0012] The present invention provides an embodiment in which the first current and the second current have the same current frequency, the first moving member and the second moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

[0013] Another object of the present invention is to provide a magnetic sensing structure with reverse actuation, which, by passing currents in different directions to the first moving member and the second moving member, causes the first moving member and the second moving member to move with a phase difference of 180 degrees, so that at least one first finger capacitor between the outer frame and the first moving member and between the outer frame and the second moving member can have a greater relative displacement, thereby achieving an extendable structure under the premise of being able to accurately measure the magnetic field.

[0014] To achieve the above objectives, the present invention provides a reverse-acting magnetic sensing structure for sensing an external magnetic field. The reverse-acting magnetic sensing structure includes: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; a first moving member disposed on one side of the first support member, the first moving member being connected to the first support member by at least one second flexible member, and the at least one first finger capacitor sandwiched between the first moving member and the outer frame; a first connecting member disposed on one side of the first moving member, the first connecting member being connected to the first moving member by a third flexible member, and the first connecting member being connected to the outer frame by a fourth flexible member; and a second moving member disposed on one side of the first connecting member, the second moving member being connected to the first support member by a fifth flexible member. A connector is provided, with at least one first finger capacitor sandwiched between the second moving member and the outer frame; a second connector is provided on one side of the second moving member, the second connector being connected to the second moving member by a sixth flexible member, the second connector being connected to the outer frame by a seventh flexible member, and the second connector being connected to the first moving member by an eighth flexible member; and a second support member is provided on the other side of the outer frame, the second support member being connected to the second moving member by at least a ninth flexible member, and the second support member being connected to the outer frame by at least a tenth flexible member; wherein, the first moving member is supplied with a first current, and the second moving member is supplied with a second current, thereby achieving the effect of specifying the force at a specific position of the structure through the driving current, thereby controlling the first finger capacitors to perform reverse operation, and thereby sensing the surrounding environmental magnetic field.

[0015] The present invention provides an embodiment in which the first current and the second current have opposite current directions.

[0016] The present invention provides an embodiment in which the first moving member generates a first movement based on the external magnetic field and the first current driving the at least one first finger capacitor of the portion, and the second moving member generates a second movement based on the external magnetic field and the second current driving the at least one first finger capacitor of the portion.

[0017] The present invention provides an embodiment in which the phase difference between the first motion and the second motion is 180 degrees.

[0018] The present invention provides an embodiment in which the first current and the second current have the same current frequency, the first moving member and the second moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

[0019] Another objective of the present invention is to provide a magnetic sensing structure with reverse actuation, which, by passing currents in different directions to the first moving member and the second moving member, and passing currents in different directions to the third moving member and the fourth moving member, causes the first moving member and the second moving member to move with a phase difference of 180 degrees, and the third moving member and the fourth moving member to move with a phase difference of 180 degrees, so that the first finger capacitor and the second finger capacitor can have a larger relative displacement, thereby achieving an extendable structure under the premise of being able to accurately measure the magnetic field.

[0020] To achieve the above objectives, the present invention provides a reverse-acting magnetic sensing structure for sensing an external magnetic field. The reverse-acting magnetic sensing structure includes: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; and a first motion component disposed on one side of the first support member, the first motion component including: a first motion member disposed on one side of the first support member, the first motion member being connected to the first support member by at least one second flexible member; and a first connecting member disposed on one side of the first motion member, the first connecting member being connected to the first motion member by a third flexible member and a fourth flexible member. The system comprises: an outer frame; a second moving member disposed on one side of the first connecting member, the second moving member being connected to the first connecting member by a fifth flexible member, and a first finger capacitor sandwiched between the second moving member and the first moving member; a second connecting member disposed on one side of the second moving member, the second connecting member being connected to the second moving member by a sixth flexible member, the second connecting member being connected to the outer frame by a seventh flexible member, and the second connecting member being connected to the first moving member by an eighth flexible member; a second support member disposed on the other side of the first moving assembly, the second support member being connected to the second moving member by at least a ninth flexible member, and the second support member being connected to the outer frame by at least a tenth flexible member; and a second moving assembly disposed on the second support member. On one side of the support member, the second motion assembly includes: a third motion member disposed on one side of the second support member, the third motion member being connected to the second support member by at least an eleventh flexible member; a third connecting member disposed on one side of the third motion member, the third connecting member being connected to the third motion member by a twelfth flexible member, and the third connecting member being connected to the outer frame by a thirteenth flexible member; a fourth motion member disposed on one side of the third connecting member, the fourth motion member being connected to the third connecting member by a fourteenth flexible member, and a second finger capacitor sandwiched between the fourth motion member and the third motion member; and a fourth connecting member disposed on one side of the fourth motion member, the fourth connecting member being connected to the fourth motion member by a fifteenth flexible member. The four connectors are connected to the outer frame by a sixteenth flexible member, the fourth connector is connected to the third moving member by a seventeenth flexible member; and a third support member is disposed on the other side of the outer frame, the third support member is connected to the fourth moving member by at least an eighteenth flexible member, and the third support member is connected to the outer frame by at least a nineteenth flexible member; wherein, the first moving member is supplied with a first current, the second moving member is supplied with a second current, the third moving member is supplied with a third current, and the fourth moving member is supplied with a fourth current, thereby achieving the ability to specify the force at a specific position of the structure through the driving current, thereby controlling the two sets of finger capacitors to perform opposite actions, thereby sensing the surrounding magnetic field, and its structure can be replicated and extended.

[0021] The present invention provides an embodiment in which the first current is opposite in direction to the second current, and the third current is opposite in direction to the fourth current.

[0022] The present invention provides an embodiment in which the first moving member drives the first finger-shaped capacitor of the portion to generate a first movement based on the external magnetic field and the first current; the second moving member drives the first finger-shaped capacitor of the portion to generate a second movement based on the external magnetic field and the second current; the third moving member drives the second finger-shaped capacitor of the portion to generate a third movement based on the external magnetic field and the third current; and the fourth moving member drives the second finger-shaped capacitor of the portion to generate a fourth movement based on the external magnetic field and the fourth current.

[0023] The present invention provides an embodiment in which the phase difference between the first motion and one of the second motions is 180 degrees, and the phase difference between the third motion and one of the fourth motions is 180 degrees.

[0024] The present invention provides an embodiment in which the first current, the second current, the third current and the fourth current have the same current frequency, the first moving member, the second moving member, the third moving member and the fourth moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

[0025] To this end, a magnetic sensing structure capable of simultaneously measuring the reverse actuation of multiple axes is provided, which is a problem that those skilled in the art wish to solve.

Implementation Method

[0026] To enable your review committee to have a better understanding of the features and effects achieved by the present invention, preferred embodiments and detailed descriptions are provided below:

[0027] Since most of the Lorentz force magnetometers currently in use are unidirectional magnetometers, that is, between two mass blocks, only one mass block is affected by the Lorentz force and moves, and the displacement between the mass block that is not affected by the Lorentz force and the mass block that is affected by the Lorentz force is measured.

[0028] The present invention utilizes the method of passing currents in different directions through the first moving part and the second moving part, and fixing their movement direction through the connection of the flexible part, so that the two mass blocks can be simultaneously affected by the Lorentz force and thus move. In this way, the relative displacement of the finger capacitor between the two mass blocks is increased, thereby increasing the accuracy of magnetic field measurement and reducing the impact of errors.

[0029] In the following, the invention will be described in detail by way of the drawings illustrating various embodiments thereof. However, the concept of the invention may be embodied in many different forms and should not be construed as being limited to the exemplary embodiments set forth herein.

[0030] First, please refer to Figure 1, which is a schematic diagram of the reverse-acting magnetometer of the present invention. As shown in the figure, a reverse-acting magnetic sensing structure 1 of the present invention will be described in detail below. It is used to sense an external magnetic field. The reverse-acting magnetic sensing structure 1 includes: an outer frame 10; a first support member 20, which is disposed on one side of the outer frame 10, and the first support member 20 is connected to the outer frame 10 by at least one first flexible member 70; a first moving member 32, which is disposed on one side of the first support member 20, and the first moving member 32 is connected to the first support member 20 by at least one second flexible member 71; a first connecting member 34, which is disposed on one side of the first moving member 32, and the first connecting member 34 is connected to the first moving member 32 by a third flexible member 72, and the first connecting member 34 is connected to the outer frame 10 by a fourth flexible member 73; and a second moving member 36, which is disposed on the outer frame 10. On one side of a connector 34, the second moving member 36 is connected to the first connector 34 by a fifth flexible member 74, and a first finger capacitor 35 is sandwiched between the second moving member 36 and the first moving member 32; a second connector 38 is disposed on one side of the second moving member 36, and the second connector 38 is connected to the second moving member 36 by a sixth flexible member 75, the second connector 38 is connected to the outer frame 10 by a seventh flexible member 76, and the second connector 38 is connected to the first moving member 32 by an eighth flexible member 77; and a second support member 40 is disposed on the other side of the outer frame 10, the second support member 40 is connected to the second moving member 36 by at least a ninth flexible member 78, and the second support member is connected to the outer frame 10 by at least a tenth flexible member 79; wherein, the first moving member 32 is supplied with a first current, and the second moving member 36 is supplied with a second current.

[0031] Next, please refer to Figure 2, which is a top view of the reverse-acting magnetometer of the present invention. As shown in the figure, the first flexible member 70, the second flexible member 71, the third flexible member 72, the fourth flexible member 73, the fifth flexible member 74, the sixth flexible member 75, the seventh flexible member 76, the eighth flexible member 77, the ninth flexible member 78, and the tenth flexible member 79 of the present invention are all repeatedly bent serpentine springs in this embodiment. This is only an example of a preferred embodiment, but as long as there is a connecting member that can be connected and has elasticity, the effects of the first flexible member 70, the second flexible member 71, the third flexible member 72, the fourth flexible member 73, the fifth flexible member 74, the sixth flexible member 75, the seventh flexible member 76, the eighth flexible member 77, the ninth flexible member 78, and the tenth flexible member 79 of the present invention can be achieved, and it is not limited thereto.

[0032] Continuing from the above, the first moving part 32 is supplied with the first current C1, and the second moving part 36 is supplied with the second current C2. The currents of the first current C1 and the second current C2 flow in opposite directions. The purpose of the first current C1 is to allow the first moving part 32 to generate a Lorentz force due to the interaction between the magnetic field and the first current C1 in the presence of the external magnetic field, thereby using the Lorentz force to propel the first moving part 32. The purpose of the second current C2 is to allow the second moving part 36 to move in the presence of the external magnetic field. In this environment, the interaction between the magnetic field and the second current C2 will generate a Lorentz force, which will then drive the second moving part 36. Therefore, the flow direction of the first current C1 and the second current C2 is not restricted. Only when the flow directions of the first current C1 and the second current C2 are opposite can the first moving part 32 and the second moving part 36 produce displacements in opposite directions due to the different directions of the Lorentz force generated by the external magnetic field, thereby increasing the relative displacement of the first finger capacitor 35.

[0033] Next, please refer to Figures 1, 2 and 3. Figure 3 is a schematic diagram of the operation of the present invention. As shown in the figure, when the first moving member 32 is supplied with the first current C1, the first moving member 32 will perform a first movement according to the external magnetic field. In this embodiment, the first movement of the first moving member 32 according to the external magnetic field is an up-and-down movement. When the second moving member 36 is supplied with the second current C2, the second moving member 36 will perform a second movement according to the external magnetic field. In this embodiment, the second movement of the second moving member 36 according to the external magnetic field is an up-and-down movement. Since the first current C1 and the second current C2 are in opposite directions, the phase difference between the first movement and the second movement is 180 degrees, so that the magnetic sensing structure 1 operating in opposite directions can measure the magnitude of the surrounding magnetic field.

[0034] Continuing from the above, another embodiment is provided, in which the frequency of one of the first currents C1 is equal to the vibration frequency of one of the first moving parts 32, the vibration intensity of one of the first moving parts 32 will increase, which can increase the displacement of the first moving parts 32 due to the Lorentz force. When the frequency of one of the second currents C2 is equal to the vibration frequency of one of the second moving parts 36, the vibration intensity of one of the second moving parts 36 will increase, which can increase the displacement of the second moving parts 36 due to the Lorentz force.

[0035] Continuing from the above, in Figure 3, in order to make the displacement of the first moving part 32 and the second moving part 36 more obvious, the displacement of the first moving part 32 and the second moving part 36 is increased. In fact, the displacement of the first moving part 32 and the second moving part 36 are both at the micrometer level, and the first finger capacitor 35 will not be completely separated, but still needs to have some contact in order for the first finger capacitor 35 to have the function of measuring displacement.

[0036] Continuing from the above, since the vibration system of the first moving part 32 and the second moving part 36 can be regarded as a second-order mass-damped-spring system, its dynamic equation is as follows: Formula (1)

[0037] Where M is the equivalent mass, C is the damping coefficient, K is the spring constant, F is the force, and x(t) is the relative displacement of the vibration system. Here, the relative displacement of the vibration system can be inferred from the capacitance value measured by the first finger capacitor 35, and the magnitude of the Lorentz force can be calculated using the known equivalent mass, damping coefficient, and spring constant. Since it is a magnetometer, F can be regarded as the following formula (II): Formula (II)

[0038] Continuing from the above, after obtaining the Lorentz force, the strength of the surrounding magnetic field B can be derived through Equation (II). This is only an example. The vibration system of the first moving part 32 and the second moving part 36 can still be regarded as a higher-order mass-damped-spring system and fitted with different dynamic equations. This invention is not limited to this.

[0039] Next, please refer to Figure 4, which is a schematic diagram of the displacement versus magnetic field of the present invention. As shown in the figure, when the displacement sensed by the first finger capacitor 35 is , the corresponding external magnetic field is , and when the displacement sensed by the first finger capacitor 35 is , the corresponding external magnetic field is , and when the displacement sensed by the first finger capacitor 35 is , the corresponding external magnetic field is .

[0040] In the above-described embodiments, the present invention provides a magnetic sensing structure with reverse actuation. By providing two sets of moving parts containing current in different directions, the two sets of moving parts have a 180-degree phase difference when moving in a magnetic field, thereby increasing the motion displacement and improving the accuracy of finger capacitive sensing.

[0041] Next, please refer to Figure 5, which is a schematic diagram of the reverse-acting magnetometer of the present invention. As shown in the figure, the present invention provides a reverse-acting magnetic sensing structure 3 for sensing an external magnetic field. The reverse-acting magnetic sensing structure 3 includes: an outer frame 10; a first support member 20 disposed on one side of the outer frame 10, the first support member 20 being connected to the outer frame 10 by at least one first flexible member 70; a first motion component 30 disposed on one side of the first support member 20, the first motion component 30 including: a first motion member 32 disposed on one side of the first support member 20, the first motion member 32 being connected to the first support member 20 by at least one second flexible member 71; a first motion component ... A connector 34 is disposed on one side of the first moving member 32. The first connector 34 is connected to the first moving member 32 by a third flexible member 72 and to the outer frame 10 by a fourth flexible member 73. A second moving member 36 is disposed on one side of the first connector 34. The second moving member 36 is connected to the first connector 34 by a fifth flexible member 74. A first finger capacitor 35 is sandwiched between the second moving member 36 and the first moving member 32. A second connector 38 is disposed on one side of the second moving member 36. The second connector 38 is connected to the second moving member 36 by a sixth flexible member 75 and to the outer frame 10 by a seventh flexible member 76. A connector 38 connects the first moving member 32 via an eighth flexible member 77; and a second support member 40 is disposed on one side of the first moving member 30, the second support member 40 is connected to the second moving member 36 via at least a ninth flexible member 78, and the second support member 40 is connected to the outer frame 10 via at least a tenth flexible member 79; a second moving assembly 50 is disposed on one side of the second support member 40, the second moving assembly 50 comprising: a third moving member 52 disposed on one side of the second support member 40, the third moving member 52 being connected to the second support member 40 via at least an eleventh flexible member 80; and a third connector 54 disposed on one side of the third moving member 52, the third connector 54... The third moving member 52 is connected by a twelfth flexible member 81, and the third connecting member 54 is connected to the outer frame 10 by a thirteenth flexible member 82; a fourth moving member 56 is disposed on one side of the third connecting member 54, and the fourth moving member 56 is connected to the third connecting member 54 by a fourteenth flexible member 83, and a second finger capacitor 55 is sandwiched between the fourth moving member 56 and the third moving member 52; a fourth connecting member 58 is disposed on one side of the fourth moving member 56, and the fourth connecting member 58 is connected to the fourth moving member 56 by a fifteenth flexible member 84, the fourth connecting member 58 is connected to the outer frame 10 by a sixteenth flexible member 85, and the fourth connecting member 58 is connected to the third moving member 52 by a seventeenth flexible member 86;A third support member 60 is disposed on the other side of the outer frame 10. The third support member 60 is connected to the fourth moving member 56 by at least an eighteenth flexible member 87, and the third support member 60 is connected to the outer frame 10 by at least a nineteenth flexible member 88. The first moving member 32 is supplied with a first current, the second moving member 36 is supplied with a second current, the third moving member 52 is supplied with a third current, and the fourth moving member 56 is supplied with a fourth current.

[0042] Next, please refer to Figure 6, which is a top view of the reverse-acting magnetometer of the present invention. As shown in the figure, the first flexible member 70, the second flexible member 71, the third flexible member 72, the fourth flexible member 73, the fifth flexible member 74, the sixth flexible member 75, the seventh flexible member 76, the eighth flexible member 77, the ninth flexible member 78, the tenth flexible member 79, the eleventh flexible member 80, the twelfth flexible member 81, the thirteenth flexible member 82, the fourteenth flexible member 83, the fifteenth flexible member 84, the sixteenth flexible member 85, the seventeenth flexible member 86, and the eighteenth flexible member 87 of the present invention are all multiple bends in this embodiment. The serpentine bending spring is merely an example of a preferred embodiment, but any flexible connecting member that can be connected can achieve the effects of the first flexible member 70, the second flexible member 71, the third flexible member 72, the fourth flexible member 73, the fifth flexible member 74, the sixth flexible member 75, the seventh flexible member 76, the eighth flexible member 77, the ninth flexible member 78, the tenth flexible member 79, the eleventh flexible member 80, the twelfth flexible member 81, the thirteenth flexible member 82, the fourteenth flexible member 83, the fifteenth flexible member 84, the sixteenth flexible member 85, the seventeenth flexible member 86, and the eighteenth flexible member 87 of the present invention, and is not limited thereto.

[0043] Continuing from the above, the first moving component 32 is supplied with the first current C1, the second moving component 36 is supplied with the second current C2, and the current flows of the first current C1 and the second current C2 are opposite in direction. The third moving component 52 is supplied with the third current C3, and the fourth moving component 56 is supplied with the fourth current C4, and the current flows of the first current C1 and the second current C2 are opposite in direction. The first current C1 is used to allow the first moving component 32 to generate a Lorentz force due to the interaction between the magnetic field and the first current C1 in an environment with an external magnetic field, thereby using the Lorentz force to propel the first moving component 32. The second current C2 is used to allow the second moving component 36 to generate a Lorentz force due to the interaction between the magnetic field and the second current C2 in an environment with an external magnetic field, thereby using the Lorentz force to propel the second moving component 36. The third current C3 is used to allow the third moving component 52 to generate a Lorentz force due to the interaction between the magnetic field and the second current C2 in an environment with an external magnetic field. In the presence of the external magnetic field, the interaction between the magnetic field and the third current C3 generates a Lorentz force, which in turn propels the third moving component 52. The purpose of the fourth current C4 is to allow the fourth moving component 56 to generate a Lorentz force in the presence of the external magnetic field due to the interaction between the magnetic field and the fourth current C4, thereby propelling the fourth moving component 56. Therefore, the flow directions of the first current C1, the second current C2, the third current C3, and the fourth current C4 are not restricted. Only when the current flows of the first current C1 and the second current C2 are opposite, and the current flows of the third current C3 and the fourth current C4 are opposite, can the first moving component 32 and the second moving component 36, as well as the third current C3 and the fourth current C4, have different directions of Lorentz force generated by the external magnetic field, resulting in opposite displacements. This increases the relative displacement of the first finger capacitor 35 and the second finger capacitor 55.

[0044] Next, please refer to Figures 5, 6, and 7A. Figure 7A is a schematic diagram of the operation of the present invention. As shown in the figure, when the first moving member 32 is supplied with the first current C1, the first moving member 32 will perform a first movement according to the external magnetic field. In this embodiment, the first movement of the first moving member 32 according to the external magnetic field is a vertical movement. When the second moving member 36 is supplied with the second current C2, the second moving member 36 will perform a second movement according to the external magnetic field. In this embodiment, the second movement of the second moving member 36 according to the external magnetic field is a vertical movement. When the third moving member 52 is supplied with the third current C3, the third moving member 52 will perform a vertical movement according to the external magnetic field. The magnetic field performs a third motion. In this embodiment, the third motion component 52 moves up and down according to the external magnetic field. When the fourth motion component 56 is supplied with the fourth current C4, the fourth motion component 56 will perform a fourth motion according to the external magnetic field. In this embodiment, the fourth motion component 56 moves up and down according to the external magnetic field. Since the first current C1 and the second current C2 are in opposite directions, and the third current C3 and the fourth current C4 are in opposite directions, the phase difference between the first motion and the second motion is 180 degrees, and the phase difference between the third motion and the fourth motion is 180 degrees. This allows the magnetic force sensing structure 3, which operates in opposite directions, to measure the magnitude of the surrounding magnetic field.

[0045] Next, please refer to Figure 7A and Figure 7B. Figure 7B is a schematic diagram of the operation of the present invention. As shown in the figure, the difference between Figure 7B and Figure 7A is only that the movement directions of the first moving member 32, the second moving member 36, the third moving member 52, and the fourth moving member 56 are different.

[0046] Continuing from the above, another embodiment is provided, in which the frequency of one of the first currents C1 is equal to the vibration frequency of one of the first moving parts 32, the vibration intensity of one of the first moving parts 32 will increase, and the displacement of the first moving part 32 due to Lorentz force will increase. When the frequency of one of the second currents C2 is equal to the vibration frequency of one of the second moving parts 36, the vibration intensity of one of the second moving parts 36 will increase, and the displacement of the second moving part 36 due to Lorentz force will increase. When the frequency of one of the third currents C3 is equal to the vibration frequency of one of the third moving parts 52, the vibration intensity of one of the third moving parts 52 will increase, and the displacement of the third moving part 52 due to Lorentz force will increase. When the frequency of one of the fourth currents C4 is equal to the vibration frequency of one of the fourth moving parts 56, the vibration intensity of one of the fourth moving parts 56 will increase, and the displacement of the fourth moving part 56 due to Lorentz force will increase.

[0047] Continuing from the above, in Figures 7A and 7B, in order to make the displacements of the first moving member 32, the second moving member 36, the third moving member 52, and the fourth moving member 56 more obvious, the displacements of the first moving member 32, the second moving member 36, the third moving member 52, and the fourth moving member 56 are actually on the micrometer level. Moreover, the first finger capacitor 35 and the second finger capacitor 55 are not completely separated and still need to have partial contact in order for the first finger capacitor 35 and the second finger capacitor 55 to have the function of measuring displacement.

[0048] The calculation description of the vibration system has been described in the above specification and will not be repeated here.

[0049] Next, please refer to Figure 8, which is a schematic diagram of the displacement versus magnetic field of the present invention. As shown in the figure, when the displacement sensed by the first finger capacitor 35 and the second finger capacitor 55 is 1.3, the corresponding external magnetic field is 1.3.

[0050] Next, another embodiment is provided. Please refer to Figure 9, which is a schematic diagram of the reverse-acting magnetometer of the present invention. As shown in the figure, the present invention provides a reverse-acting magnetic sensing structure 5, which differs from the reverse-acting magnetic sensing structure 3 of the present invention in that it is an elongated structure of the reverse-acting magnetic sensing structure 3. More structures identical to the first motion component 30 can be added to the first motion component 30 and the second motion component 50 to increase the length and sensing range of the reverse-acting magnetic sensing structure 5.

[0051] Continuing from the above, please refer to Figure 10, which is a top view of the reverse-acting magnetometer of the present invention. In this embodiment, a third motion component 100 is disposed after the second motion component 50, forming a reverse-acting magnetic sensing structure 5 with three sets of motion components. The same structure will not be described again here; only the third motion component 100 will be described. The third motion component 100 is disposed on one side of the third support member 60. The 100 series includes: a fifth moving member 102 disposed on one side of the third support member 60, the fifth moving member 102 being connected to the third support member 60 by at least a twentieth flexible member 89; a fifth connecting member 104 disposed on one side of the fifth moving member 102, the fifth connecting member 104 being connected to the fifth moving member 102 by a twenty-first flexible member 90, and the fifth connecting member 104 being connected to the outer frame 10 by a twenty-second flexible member 91; and a sixth moving member 106 disposed on... On one side of the fifth connector 104, the sixth moving member 106 is connected to the fifth connector 104 by a twenty-third flexible member 92, and a third finger capacitor 105 is sandwiched between the sixth moving member 106 and the fifth moving member 102; a sixth connector 108 is disposed on one side of the sixth moving member 106, and the sixth connector 108 is connected to the sixth moving member 106 by a twenty-fourth flexible member 93, and the sixth connector 108 is connected to the outer frame 10 by a twenty-fifth flexible member 94. The sixth connector 108 is connected to the fifth moving member 102 by a twenty-sixth flexible member 95 and a fourth support member 110, which is disposed on the other side of the outer frame 10. The fourth support member 110 is connected to the sixth moving member 106 by at least a twenty-seventh flexible member 96 and the fourth support member 110 is connected to the outer frame 10 by at least a twenty-eighth flexible member 97. The fifth moving member 102 is supplied with a fifth current C5 and the sixth moving member 106 is supplied with a sixth current C6.

[0052] Next, please refer to Figures 9, 10, and 11. Figure 11 is a schematic diagram of the operation of the present invention. As shown in the figure, when the first moving member 32 is supplied with the first current C1, the first moving member 32 will perform a first movement according to the external magnetic field. In this embodiment, the first movement of the first moving member 32 according to the external magnetic field is an up-and-down movement. When the second moving member 36 is supplied with the second current C2, the second moving member 36 will perform a second movement according to the external magnetic field. In this embodiment, the second movement of the second moving member 36 according to the external magnetic field is an up-and-down movement. When the third moving member 52 is supplied with the third current C3, the third moving member 52 will perform a third movement according to the external magnetic field. In this embodiment, the third movement of the third moving member 52 according to the external magnetic field is an up-and-down movement. When the fourth moving member 56 is supplied with the fourth current C4, the fourth moving member 56 will perform a fourth movement according to the external magnetic field. In this embodiment, the fourth moving member 56... 56. Based on the external magnetic field, the fourth motion is an up-and-down motion. When the fifth motion member 102 is supplied with the fifth current C5, the fifth motion member 102 will perform a fifth motion based on the external magnetic field. In this embodiment, the fifth motion member 102 moves up and down based on the external magnetic field. When the sixth motion member 106 is supplied with the sixth current C6, the sixth motion member 106 will perform a sixth motion based on the external magnetic field. In this embodiment, the sixth motion member 106 moves up and down based on the external magnetic field. Since the first current C1 and the second current C2 are in opposite directions, the third current C3 and the fourth current C4 are in opposite directions, and the fifth current C5 and the sixth current C6 are in opposite directions, the phase difference between the first motion and the second motion is 180 degrees, the phase difference between the third motion and the fourth motion is 180 degrees, and the phase difference between the fifth motion and the sixth motion is 180 degrees. This allows the magnetic sensing structure 5, which operates in the opposite direction, to measure the magnitude of the surrounding magnetic field.

[0053] Next, please refer to Figure 12, which is a schematic diagram of the displacement versus magnetic field of the present invention. As shown in the figure, when the displacement sensed by the first finger capacitor 35 is 9.5, the corresponding external magnetic field is , and when the displacement sensed by the first finger capacitor 35 is , the corresponding external magnetic field is , and when the displacement sensed by the first finger capacitor 35 is , the corresponding external magnetic field is .

[0054] In the above-described embodiments, the present invention provides a magnetic sensing structure with reverse actuation. By providing multiple sets of moving parts containing current in different directions, the multiple sets of moving parts have a 180-degree phase difference when moving in the magnetic field, thereby greatly improving the motion displacement and increasing the accuracy of finger capacitive sensing. Furthermore, through a similar structure, the magnetic field sensing structure can be extended directly according to the requirements to meet the magnetic field sensing requirements of different locations.

[0055] Next, another embodiment is provided. Please refer to Figure 1 and Figure 13 together. Figure 13 is a schematic diagram of the reverse-acting magnetometer of the present invention. As shown in the figure, the present invention provides a reverse-acting magnetic sensing structure 7, which differs from the reverse-acting magnetic sensing structure 1 of the present invention in that the first finger capacitor 35 of the reverse-acting magnetic sensing structure 7 is replaced by a plurality of first finger capacitors 35 and disposed between the outer frame 10 and the first moving member 32 and between the outer frame 10 and the second moving member 36, so as to sense the displacement of the first moving member 32 and the second moving member 36.

[0056] Continuing from the above, please refer to Figures 13 and 14 together. Figure 14 is a top view of the reverse-acting magnetometer of the present invention. As shown in the figure, the present invention provides a reverse-acting magnetic sensing structure 7. The same structure will not be described again. Here, only the first finger capacitors 35 are described. At least one first finger capacitor 35 is sandwiched between the first moving member 32 and the outer frame 10. At least one first finger capacitor 35 is sandwiched between the second moving member 36 and the outer frame 10. The first moving member 32 is supplied with a first current C1, and the second moving member 36 is supplied with a second current C2.

[0057] Continuing from the above, please refer to Figures 13, 14 and 15. Figure 15 is a schematic diagram of the operation of the present invention. As shown in the figure, when the first moving member 32 is supplied with the first current C1, the first moving member 32 will perform a first movement according to the external magnetic field. In this embodiment, the first movement of the first moving member 32 according to the external magnetic field is an up-and-down movement. When the second moving member 36 is supplied with the second current C2, the second moving member 36 will perform a second movement according to the external magnetic field. In this embodiment, the second movement of the second moving member 36 according to the external magnetic field is an up-and-down movement. Since the first current C1 and the second current C2 are in opposite directions, the phase difference between the first movement and the second movement is 180 degrees, so that the magnetic sensing structure 7 operating in opposite directions can measure the magnitude of the surrounding magnetic field.

[0058] Continuing from the above, referring again to Figures 5, 9 and 13, the reverse-acting magnetic sensing structure 7 can also be extended in length by adding the same components as the reverse-acting magnetic sensing structure 3 and the reverse-acting magnetic sensing structure 5, so that it also has the third moving member 52, the fourth moving member 56, the fifth moving member 102 and the sixth moving member 106, so that the reverse-acting magnetic sensing structure 7 can have a larger area to sense the magnitude of the surrounding magnetic field.

[0059] The calculation description of the vibration system has been described in the above specification and will not be repeated here.

[0060] In the above-described embodiments, the present invention provides a magnetic sensing structure with reverse actuation. By providing two or more sets of moving parts containing current in different directions, the two or more sets of moving parts have a 180-degree phase difference when moving in the magnetic field, which greatly improves the motion displacement, thereby increasing the accuracy of finger capacitive sensing. Furthermore, through a similar structure, the magnetic field sensing structure can be extended directly according to the requirements to meet the magnetic field sensing requirements of different locations.

[0061] Therefore, this invention is indeed novel, inventive and industrially applicable, and should undoubtedly meet the requirements for patent application under the Patent Law of our country. Therefore, we hereby file an invention patent application in accordance with the law, and earnestly pray that the Bureau will grant the patent as soon as possible.

[0062] However, the above description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. All equivalent changes and modifications made to the shape, structure, features and spirit described in the claims of the present invention should be included in the scope of the claims of the present invention. [Simplified Explanation of the Diagram]

[0063] Figure 1: A schematic diagram of the reverse-acting magnetometer of the present invention; Figure 2: A top view schematic diagram of the reverse-acting magnetometer of the present invention; Figure 3: A schematic diagram of the operation of the present invention; Figure 4: A schematic diagram of the displacement versus magnetic field of the present invention; Figure 5: A schematic diagram of the reverse-acting magnetometer of the present invention; Figure 6: A top view schematic diagram of the reverse-acting magnetometer of the present invention; Figure 7A: A schematic diagram of the operation of the present invention; Figure 7B: A schematic diagram of the operation of the present invention; Figure 8: A schematic diagram of the displacement versus magnetic field of the present invention; Figure 9: A schematic diagram of the reverse-acting magnetometer of the present invention; Figure 10: A top view schematic diagram of the reverse-acting magnetometer of the present invention; Figure 11: A schematic diagram of the operation of the present invention; Figure 12: A schematic diagram of the displacement versus magnetic field of the present invention; Figure 13: A schematic diagram of the reverse-acting magnetometer of the present invention; Figure 14: is a top view of the reverse-acting magnetometer of the present invention; and Figure 15: is an actuation diagram of the present invention.

Claims

1. A reverse-actuated magnetic sensing structure for sensing an external magnetic field, the reverse-actuated magnetic sensing structure comprising: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; a first moving member disposed on one side of the first support member, the first moving member being connected to the first support member by at least one second flexible member; a first connecting member disposed on one side of the first moving member, the first connecting member being connected to the first moving member by a third flexible member, the first connecting member being connected to the outer frame by a fourth flexible member; a second moving member disposed on one side of the first connecting member, the second moving member being connected to the first connecting member by a fifth flexible member, a first finger capacitor sandwiched between the second moving member and the first moving member; A second connector, disposed on one side of the second moving member, is connected to the second moving member by a sixth flexible member, to the outer frame by a seventh flexible member, and to the first moving member by an eighth flexible member; and a second support member, disposed on the other side of the outer frame, is connected to the second moving member by at least a ninth flexible member, and to the outer frame by at least a tenth flexible member; wherein... The first moving part is supplied with a first current, and the second moving part is supplied with a second current.

2. The magnetic sensing structure with reverse operation as described in claim 1, wherein the first current and the second current have opposite current directions.

3. The magnetic sensing structure with reverse actuation as described in claim 2, wherein the first moving member generates a first movement based on the external magnetic field and the first current driving the first finger capacitor of the portion, and the second moving member generates a second movement based on the external magnetic field and the second current driving the first finger capacitor of the portion.

4. The magnetic sensing structure with reverse actuation as described in claim 3, wherein the phase difference between the first motion and the second motion is 180 degrees.

5. The magnetic sensing structure with reverse actuation as described in claim 2, wherein the first current and the second current have the same current frequency, the first moving member and the second moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

6. A reverse-actuated magnetic sensing structure for sensing an external magnetic field, the reverse-actuated magnetic sensing structure comprising: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; a first moving member disposed on one side of the first support member, the first moving member being connected to the first support member by at least one second flexible member, and at least one first finger-shaped capacitor sandwiched between the first moving member and the outer frame; a first connecting member disposed on one side of the first moving member, the first connecting member being connected to the first moving member by a third flexible member, and the first connecting member being connected to the outer frame by a fourth flexible member; and a second moving member disposed on one side of the first connecting member, the second moving member being connected to the first connecting member by a fifth flexible member, and the at least one first finger-shaped capacitor sandwiched between the second moving member and the outer frame. A second connector, disposed on one side of the second moving member, is connected to the second moving member by a sixth flexible member, to the outer frame by a seventh flexible member, and to the first moving member by an eighth flexible member; and a second support member, disposed on the other side of the outer frame, is connected to the second moving member by at least a ninth flexible member, and to the outer frame by at least a tenth flexible member; wherein... The first moving part is supplied with a first current, and the second moving part is supplied with a second current.

7. The magnetic sensing structure with reverse actuation as described in claim 6, wherein the first current and the second current have opposite current directions.

8. The reverse-actuated magnetic sensing structure as described in claim 7, wherein the first moving member generates a first movement based on the external magnetic field and the first current driving the at least one first finger capacitor of the portion, and the second moving member generates a second movement based on the external magnetic field and the second current driving the at least one first finger capacitor of the portion.

9. The magnetic sensing structure with reverse actuation as described in claim 8, wherein the phase difference between the first motion and the second motion is 180 degrees.

10. The reverse-acting magnetic sensing structure as described in claim 6, wherein the first current and the second current have the same current frequency, the first moving member and the second moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

11. A reverse-actuated magnetic sensing structure for sensing an external magnetic field, the reverse-actuated magnetic sensing structure comprising: an outer frame; a first support member disposed on one side of the outer frame, the first support member being connected to the outer frame by at least one first flexible member; a first motion component disposed on one side of the first support member, the first motion component comprising: a first motion member disposed on one side of the first support member, the first motion member being connected to the first support member by at least one second flexible member; a first connector disposed on one side of the first motion member, the first connector being connected to the first motion member by a third flexible member, the first connector being connected to the outer frame by a fourth flexible member; a second motion member disposed on one side of the first connector, the second motion member being connected to the first connector by a fifth flexible member, a first finger capacitor sandwiched between the second motion member and the first motion member; A second connector disposed on one side of the second moving member, the second connector being connected to the second moving member by a sixth flexible member, the second connector being connected to the outer frame by a seventh flexible member, and the second connector being connected to the first moving member by an eighth flexible member; and a second support member disposed on one side of the first moving component, the second support member being connected to the second moving member by at least a ninth flexible member, and the second support member being connected to the outer frame by at least a tenth flexible member; a second moving component disposed on one side of the second support member, the second moving component comprising: a third moving member disposed on one side of the second support member, the third moving member being connected to the second support member by at least an eleventh flexible member; and a third connector disposed on one side of the third moving member, the third connector being connected to the third moving member by a twelfth flexible member, and the third connector being connected to the outer frame by a thirteenth flexible member; A fourth moving member is disposed on one side of the third connecting member, and the fourth moving member is connected to the third connecting member by a fourteenth flexible member. A second finger-shaped capacitor is sandwiched between the fourth moving member and the third moving member. A fourth connecting member is disposed on one side of the fourth moving member, and the fourth connecting member is connected to the fourth moving member by a fifteenth flexible member. The fourth connecting member is connected to the outer frame by a sixteenth flexible member, and the fourth connecting member is connected to the third moving member by a seventeenth flexible member. A third support member is disposed on the other side of the outer frame, and the third support member is connected to the fourth moving member by at least an eighteenth flexible member, and the third support member is connected to the outer frame by at least a nineteenth flexible member. The first moving part is supplied with a first current, the second moving part is supplied with a second current, the third moving part is supplied with a third current, and the fourth moving part is supplied with a fourth current.

12. The magnetic sensing structure with reverse actuation as described in claim 11, wherein the first current is opposite in direction to the second current, and the third current is opposite in direction to the fourth current.

13. The reverse-actuated magnetic sensing structure as described in claim 12, wherein the first moving member generates a first movement based on the external magnetic field and the first current driving the first finger capacitor of the portion, the second moving member generates a second movement based on the external magnetic field and the second current driving the first finger capacitor of the portion, the third moving member generates a third movement based on the external magnetic field and the third current driving the second finger capacitor of the portion, and the fourth moving member generates a fourth movement based on the external magnetic field and the fourth current driving the second finger capacitor of the portion.

14. The magnetic sensing structure with reverse actuation as described in claim 13, wherein the phase difference between the first motion and one of the second motions is 180 degrees, and the phase difference between the third motion and one of the fourth motions is 180 degrees.

15. The reverse-acting magnetic sensing structure as described in claim 11, wherein the first current, the second current, the third current, and the fourth current have the same current frequency, and the first moving member, the second moving member, the third moving member, and the fourth moving member have the same resonant frequency, and the current frequency is the same as the resonant frequency.

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