Nanoprobes and method of testing electronic devices

Abstract

A nanoprobe, nanoprobe system, and methods of making measurements on devices using signals in the GHz range. The signals are made through a nanoprobe having an ultrasharp tip. Improved properties are delivered through enhanced, space-efficient shielding and system geometry. The probe tip may be angled and a trapezoidally-shaped circuit board containing electronic circuitry such as switches and amplifier can all be contained within a vacuum chamber in a multiple probe (typically

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