Photonic integrated circuit and photonic system for embedded microlens

Abstract

Embodiments described herein relate to a photonic device having a microlens and micromirror embedded therein and methods of fabricating such a device. An example photonic device comprises a substrate; a buried oxide (BOX) layer disposed over the substrate; a waveguide layer disposed over the BOX layer, the waveguide layer comprising a waveguide; a micromirror arranged in at least a portion of the waveguide layer; a cladding disposed over the waveguide layer; and a lens layer disposed over the cladding, the lens layer having a microlens aligned with the micromirror.

Images