Hybrid integrated in-coupler and out-coupler grating structure
TW202634314APending Publication Date: 2026-08-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114148317
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-10
- Filing Date
- 2025-12-10
- Publication Date
- 2026-08-16
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Abstract
A waveguide combiner includes a substrate and a first grating disposed within or over the substrate and comprising first grating structures. Each of the first grating structures include a first sidewall having a blazed surface, and a second sidewall opposing the first sidewall, the second sidewall is a vertical sidewall. A second grating is disposed within or over the substrate and comprises second grating structures, each of the second grating structures having a different height.
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