Rotary drive mechanism, driving method, coupling method and coupling device

Abstract

This invention provides a rotary drive mechanism, a driving method, a coupling method, and a coupling device. The rotary drive mechanism comprises a plurality of rotating components, each including a movable seat that can be driven to move in an arc along a base, the arc path of which forms a trajectory centered on an axis. This provides a rotary drive mechanism that differs from existing technologies and is also capable of multi-axial driving, thereby promoting industrial development and healthy competition.

Description

[Technical Field]

[0001] The present invention relates to a rotary drive mechanism, a drive method, a coupling method, and a coupling device, and more particularly to a rotary drive mechanism, a drive method, a coupling method, and a coupling device that can be used to drive the movement of a fiber optic array element in a process of coupling a fiber optic array element to an integrated circuit element. [Previous Technology]

[0002] In semiconductor manufacturing processes, silicon photonics (SiPh) technology has become a key focus of industrial development in order to produce chips with higher transmission efficiency and lower power consumption. In silicon photonics technology, whether it's pluggable transceiver optical architecture (PTO), on-board optical architecture (OBO), co-packaged optical architecture (CPO), or optical I / O architecture, fiber optic array elements (FAU) need to be coupled onto integrated circuit elements (ICs). Currently, semiconductor manufacturing processes have evolved to 2.5D or 3D packaging, and the integrated circuit elements and fiber optic array elements have also undergone structural changes in accordance with the evolution of the manufacturing process. For example, integrated circuit elements may incorporate photonic integrated circuits (PICs). The integrated circuit (IC) includes an optical coupler, a socket, and an optical fiber connected between the optical coupler and the socket. The photonic integrated circuit of the integrated circuit element is coupled by the optical coupler of the optical fiber array element and communicates with the outside world through the optical fiber and the socket of the optical fiber array element.

[0003] In the process of coupling the fiber array element to the integrated circuit element, the fiber array element usually needs to be driven to move in multiple axes, such as linear movement along the X, Y, and Z axes and / or rotational movement along the θx, θy, and θz axes. Although the prior art can indeed drive the fiber array element to move in multiple axes, there is still a need to provide a new mechanism / method / apparatus that can also be driven in multiple axes to promote industrial development and healthy competition. [Summary of the Invention]

[0004] Therefore, the object of the present invention is to provide a rotary drive mechanism that can improve at least one disadvantage of the prior art.

[0005] Another object of the present invention is to provide a driving method that can improve at least one disadvantage of the prior art.

[0006] Another object of the present invention is to provide a rotary drive mechanism that can be used to perform the drive method.

[0007] Another object of the present invention is to provide a coupling method that can improve at least one disadvantage of the prior art.

[0008] Another object of the present invention is to provide a coupling device that can be used to perform the driving method.

[0009] The rotary drive mechanism according to the purpose of the present invention comprises a plurality of rotary components, each rotary component including: a movable seat that can be driven to move in an arc along a base, the trajectory formed by the arc path of the movable seat moving is centered on an axis.

[0010] According to another objective of the present invention, a driving method is applicable to moving an optical fiber array element, comprising: holding an optical fiber array element by a holding mechanism and driving the holding mechanism by a rotary drive mechanism composed of a plurality of rotating components; and driving a movable seat of each of the rotating components to move in an arc along a base to form a trajectory centered on an axis to move the optical fiber array element.

[0011] A rotary drive mechanism according to another object of the present invention can be used to perform the drive method, including a plurality of such rotary components.

[0012] According to another object of the present invention, the coupling method is applicable to the coupling of an optical fiber array element and an integrated circuit element, comprising: holding an optical fiber array element by a holding mechanism, and driving the holding mechanism to move the optical fiber array element to an integrated circuit element by a rotation drive mechanism composed of a plurality of rotating components; allowing a movable seat of each rotating component to be driven to move in an arc along a base, the arc path of the movable seat forming a trajectory centered on an axis to rotate and move, thereby moving the optical fiber array element to adjust the attitude of the optical fiber array element until the intensity value of an optical signal of the optical fiber array element falls within a preset range.

[0013] A coupling device according to yet another object of the present invention can be used to perform the coupling method, including a rotary drive mechanism composed of a plurality of the rotary components.

[0014] The rotary drive mechanism, drive method, coupling method and coupling device of the present invention provide a rotary drive mechanism, drive method, coupling method and coupling device that are different from the prior art and can also perform multi-axial drive, so as to promote industrial development and healthy competition.

Implementation Method

[0015] Please refer to Figure 1. The embodiments of the present invention are applicable to the process of coupling an optical fiber array element W1 to an integrated circuit element W2.

[0016] Please refer to Figures 2, 3, and 4. The fiber array element W1 is provided with an optical coupler W11, a socket W12, and an optical fiber W13 connecting the optical coupler W11 and the socket W12. The optical coupler W11 is made of a light-transmitting material and has a prism W111 on a first side W112 away from the socket W12. The socket W12 allows the optical fiber W13 to pass through and be exposed on a second side W121 away from the optical coupler W11. The socket W12 is provided with a wider first seat W122, a narrower second seat W123, and two guide holes W124 passing through the first seat W122 and the second seat W123. The second side W121 is inclined outward from top to bottom. The optical fiber section W13 is composed of a plurality of optical fibers W131 and is flexible.

[0017] Please refer to Figures 1 and 2. The integrated circuit element W2 is provided with a carrier plate W21, a cover W22 provided on the carrier plate W21, and a photonic integrated circuit W23 provided on the carrier plate W21 (in this embodiment of the invention, a plurality of the photonic integrated circuits W23 are provided on the carrier plate W21); the carrier plate W21 is roughly rectangular, and the photonic integrated circuits W23 can be arranged on one side of the carrier plate W21; The cover W22 has a first cover portion W221, a second cover portion W222 with a height slightly lower than the first cover portion W221, and a cutout section W223 located between the first cover portion W221 and the second cover portion W222, which can expose the photonic integrated circuit W23. The cutout section W223 can be provided according to the design requirements of the photonic integrated circuit W23, for example, at each of the four near sides of the corresponding rectangular carrier plate W21. Each photonic integrated circuit W23 is provided with a lens array W231. The lens array W231 is formed by a matrix arrangement of a plurality of lenses W2311.

[0018] Please refer to Figures 2 and 5. When the fiber array element W1 is coupled to the integrated circuit element W2, the optical coupler W11 of the fiber array element W1 is attached to the photonic integrated circuit W23, and the socket W12 is attached to the second cover W222 of the cover W22. The fiber array element W1 uses the prism W111 to correspond to the lens array W231, so that an optical signal W3 can be transmitted between the prism W111 of the fiber array element W1 and the lens array W231 of the photonic integrated circuit W23. The optical signal W3 is supplied to the fiber array element W1 by a measurement unit 1 (Figure 14), and the optical signal W3 can be transmitted from the fiber array element W1 to the integrated circuit W23. The optical signal W3 transmitted back to the fiber array element W1 is transmitted through the integrated circuit element W2. The measurement unit 1 (Fig. 14) can measure the intensity value of the optical signal W3 transmitted back to the fiber array element W1. Specifically, the optical signal W3 can be reflected by the prism W111 and then transmitted forward and downward at an angle to the lens W2311 of the lens array W231. The optical coupler W11 and the photonic integrated circuit W23 can be bonded and fixed together by a first adhesive material F1, and the socket part W12 and the cover W22 can be bonded and fixed together by a second adhesive material F2. In this embodiment of the invention, the first adhesive material F1 is a UV-curable adhesive, and the second adhesive material F2 is a thermosetting adhesive. In other embodiments of the invention, the cover W22 may only have the first cover part W221, and the socket part W12 is attached to the carrier plate W21.

[0019] Please refer to Figure 6. The driving method and coupling method of the present invention can be described using a coupling device 2 as shown in the figure, which is applicable to holding and moving the fiber array element W1 and coupling the fiber array element W1 to the integrated circuit element W2. The coupling device 2 includes: a linear driving mechanism A, which is mounted on a machine T; a rotary driving mechanism B, which is mounted on the linear driving mechanism A and can be driven by the linear driving mechanism A to make multi-axial linear movements; a holding mechanism C, which is mounted on the rotary driving mechanism B and can be driven by the rotary driving mechanism B to make multi-axial rotational movements; the holding mechanism C can hold the fiber array element W1 and drive the fiber array element W1 to make multi-axial linear or rotational movements under the drive of the linear driving mechanism A and the rotary driving mechanism B; and an inspection mechanism D, which is mounted on the linear driving mechanism A and can be driven by the linear driving mechanism A to make multi-axial linear movements, and can inspect the posture of the integrated circuit element W2 (Figure 1).

[0020] Please refer to Figure 6. The following description of the embodiment of the present invention uses the horizontal direction as a first direction d1, the horizontal direction and the direction orthogonal to the first direction d1 as a second direction d2, and the vertical direction and the direction orthogonal to the first direction d1 and the second direction d2 as a third direction d3. The machine T is also provided with a first platform 3, a second platform 4 on the second direction d2 that is spaced apart from the first platform 3, a glue application station 5 located on one side of the first platform 3, an inspection station 6 located between the first platform 3 and the second platform 4, and a control unit 7.

[0021] Please refer to Figures 6 and 7. The linear drive mechanism A includes: a first linear drive component A1 disposed on the machine base T, a second linear drive component A2 disposed on the first linear drive component A1, and a third linear drive component A3 disposed on the second linear drive component A2; the first linear drive component A1 is provided with two first rail seats A11 spaced apart on the machine base T and two first slides A12 respectively disposed on the two first rail seats A11; the first rail seats A11 extend along the first direction d1, and the first slides A12 can move along the first direction d1 on the first rail seats A11; the second linear drive component A2 is provided with a second rail seat A21 spanning the two first slides A12 and a second slide A22 disposed on the second rail seat A21; the second rail seat A21 extends along the second direction d2, and the second slide A22 can move along the second direction d2 on the second rail seat A21; The third linear motion component A3 is provided with a third rail seat A31 and a third slide A32 on the second slide seat A22; the third rail seat A31 extends along the third direction d3, and the third slide A32 can move along the third direction d3 on the third rail seat A31; the linear drive mechanism A can drive the rotary drive mechanism B to drive the holding mechanism C to move the fiber array element W1 in three degrees of freedom: the first direction d1, the second direction d2, and the third direction d3; in this embodiment of the invention, the first rail seat A11 and the second rail seat A21 are driven by linear motors, but this is not limited to them, and a combination of a rotary motor and a screw can also be used, for example; in this embodiment of the invention, the third rail seat A31 is driven by a combination of a rotary motor and a screw, but this is not limited to them, and a linear motor can also be used, for example.

[0022] Please refer to Figure 7. The inspection mechanism D is provided with an image-capturing component D1 and a distance sensor D2. The image-capturing component D1 is provided with an image sensor D11, a lens D12, and a light source D13. Referring to Figure 1, the image-capturing component D1 can capture an image of the photonic integrated circuit W23 and / or the lens array W231 above the integrated circuit element W2 to obtain the position of the photonic integrated circuit W23 and / or the lens array W231. The distance sensor D2 can be optically... A reflective sensor can sense the distance to at least three non-collinear points on the upper surface of the photonic integrated circuit W23 to obtain the height of the points, and obtain the flatness of the upper surface of the photonic integrated circuit W23 from the height of the points; the inspection mechanism D checks the orientation of the integrated circuit element W2 by obtaining the position of the photonic integrated circuit W23 and / or the lens array W231 through the imaging component D1 and obtaining the flatness of the upper surface of the photonic integrated circuit W23 through the distance sensor D2.

[0023] Please refer to Figures 7 and 8. The rotary drive mechanism B is provided with: a first rotary component B1 disposed on the third slide A32, a second rotary component B2 disposed on the first rotary component B1, and a third rotary component B3 disposed on the second rotary component B2.

[0024] Please refer to Figures 8 and 9. The first rotating assembly B1 includes a first base B11 disposed on the third slide A32 (Figure 7), a first movable seat B12 disposed on the first base B11, a first driver B13 capable of driving the first movable seat B12 to move, and a first connecting member B14 disposed on the first movable seat B12; the first base B11 has an arcuate concave surface facing the first movable seat B12, and the first movable seat B12 has an arcuate convex surface facing the first base B11. The seat B12 can be driven by the first driver B13 to move in an arc along the first base B11 and drive the first connector B14 to swing left and right in an arc path. The first trajectory R1 formed by the arc path of the first moving seat B12 is centered on a first axis L1 parallel to the third direction d3 (the radius from the first trajectory R1 to the first axis L1 in Figure 9 is r1). In this embodiment of the invention, the first base B11 and the first moving seat B12 are connected by a cross bearing to enable relative movement between them.

[0025] Please refer to Figures 8 and 10. The second rotating assembly B2 includes a second base B21 disposed on the first connecting member B14 (Figure 9), a second movable seat B22 disposed on the second base B21, a second driver B23 capable of driving the second movable seat B22 to move, and a second connecting member B24 disposed on the second movable seat B22. The second base B21 has an arcuate concave surface facing the second movable seat B22, and the second movable seat B22 has an arcuate convex surface facing the second base B21. The movable seat B22 can be driven by the second driver B23 to move in an arc along the second base B21 and drive the second connector B24 to swing in an upper and lower arc path. The second trajectory R2 formed by the arc path of the second movable seat B22 is centered on a second axis L2 parallel to the first direction d1 (the radius from the second trajectory R2 to the second axis L2 in Figure 10 is r2). In this embodiment of the invention, the second base B21 and the second movable seat B22 are connected by a cross bearing to enable relative movement between them.

[0026] Please refer to Figures 8 and 11. The third rotating assembly B3 includes a third base B31 disposed on the second connector B24 (Figure 10), a third movable seat B32 disposed on the third base B31, a third driver B33 capable of driving the third movable seat B32 to move, and a third connector B34 disposed on the third movable seat B32; the third base B31 has an arcuate concave surface facing the third movable seat B32, and the third movable seat B32 has an arcuate convex surface facing the third base B31. The movable seat B32 can be driven by the third driver B33 to move in an arc along the third base B31 and drive the third connector B34 to swing in a forward and backward arc path. The arc path formed by the movement of the third movable seat B32 forms a third trajectory R3 with a third axis L3 parallel to the second direction d2 as the axis (the radius from the third trajectory R3 to the third axis L3 in Figure 11 is r3). ​​In this embodiment of the invention, the third base B31 and the third movable seat B32 are connected by a cross bearing to enable relative movement between them.

[0027] Please refer to Figures 8 and 12. The first connector B14 has a vertical first connecting surface B141 and a horizontal second connecting surface B142; the second connector B24 has a horizontal third connecting surface B241 and an inclined fourth connecting surface B242; the third connector B34 has an inclined fifth connecting surface B341 and a vertical sixth connecting surface B342; the first connecting surface B141 is approximately parallel to the sixth connecting surface B342; the fourth connecting surface B242 is approximately parallel to the fifth connecting surface B341; the first connector B14 is disposed on the first movable seat B12 of the first rotating assembly B1 with the first connecting surface B141; the second rotating assembly B2 is disposed below the first connector B14, and the second base B21 is disposed on the second connecting surface B142 of the first connector B14; the second connector B24 is disposed on the second movable seat B22 with the third connecting surface B241; The third rotating component B3 is disposed on the fourth connecting surface B242 of the second connector B24 with the third base B31; the third connector B34 is disposed on the third moving seat B32 with the fifth connecting surface B341 of the second connector B24; the retaining mechanism C (Fig. 7) is disposed on the sixth connecting surface B342.

[0028] Please refer to Figure 13. The first axis L1, the second axis L2, and the third axis L3 intersect (orthogonalize) each other at a pivot point Lp. The rotation drive mechanism B can drive the holding mechanism C to rotate the fiber array element W1 around the pivot point Lp as the rotation center, with the first axis L1, the second axis L2, and the third axis L3 as the axes. The preset position of the pivot point Lp is that when the fiber array element W1 is held by the holding mechanism C, it is preset to correspond to the lower part of the optical coupler W11 and the front of the prism W111. Please refer to Figure 5. When the fiber array element W1 is coupled to the integrated circuit element W2, the lower part of the optical coupler W11 and the front of the prism W111 are also approximately located on the upper surface of the photonic integrated circuit W23 and correspond to the lens array W231.

[0029] Please refer to Figures 14 and 15. The holding mechanism C includes: a bracket C1, a holding member C2 disposed on the bracket C1 and capable of holding the fiber array element W1, a docking member C3 disposed on the bracket C1 and connected to the measurement unit 1, a driving component C4 disposed on the bracket C1 and capable of driving the docking member C3 to move along the first direction d1, and a curing component C5 disposed on the bracket C1 and capable of curing adhesive. The bracket C1 has an air passage C12 communicating with an air nozzle C11, and the air nozzle C11 is connected to a negative pressure source (not shown). The holding member C2 and the docking member C3 are disposed on the bracket C1 and can move synchronously. The docking member C3 can move relative to the holding member C2 to selectively dock with or not dock with the fiber array element W1, so that the holding mechanism C can not only hold the fiber array element W1 but also facilitate the measurement unit 1 to measure the fiber array element W1.

[0030] Please refer to Figures 15, 16, and 17. The retaining member C2 is provided with a first retaining part C21 and a second retaining part C22 that is spaced apart from the first retaining part C21 in the first direction d1. The first retaining part C21 can hold the optical coupler part W11 of the fiber array element W1, and the second retaining part C22 can hold the socket part W12 of the fiber array element W1. The way in which the retaining member C2 holds both ends of the fiber array element W1 makes the fiber array element W1 securely held on the retaining member C2, thereby reducing the possibility of the fiber array element W1 falling off the retaining mechanism C. The first holding portion C21 is provided with a first holding surface C211 and a first negative pressure hole C212 communicating with the first holding surface C211. The optical coupler portion W11 of the fiber array element W1 can be adsorbed and held on the first holding surface C211 through the first negative pressure hole C212. The second holding portion C22 is provided with a second holding surface C221 and a second negative pressure hole C222 communicating with the second holding surface C221. The socket portion W12 of the fiber array element W1 can be adsorbed and held on the second holding surface C221 through the second negative pressure hole C222. The first negative pressure hole C212 and the second negative pressure hole C222 are connected to the air passage C12. The retaining member C2 is provided with a first limiting part C23 and a second limiting part C24. The first limiting part C23 is provided on the side of the second retaining part C22 close to the first retaining part C21, and the second limiting part C24 is provided on the side of the second retaining part C22 away from the first retaining part C21. The first limiting part C23 is provided with a first clearance area C231 through which the optical fiber part W13 of the optical fiber array element W1 passes, and the second limiting part C24 is provided with a second clearance area C241 through which the second seat part W123 of the socket part W12 of the optical fiber array element W1 passes. When the fiber array element W1 is held by the retainer C2, the wider first seat W122 of the socket W12 will be positioned between the first limiting part C23 and the second limiting part C24, thereby restricting the movement of the fiber array element W1 on the retainer C2 in the first direction d1.

[0031] Please refer to Figures 18, 19, and 20. The docking member C3 is indirectly mounted on the bracket C1 via the driving assembly C4 (Figure 15). The driving assembly C4 is provided with a driving member C41, a movable member C42 that can be driven by the driving member C41, and a mounting base C43 disposed on the movable member C42. The docking member C3 is disposed on the mounting base C43 and can be driven by the driving member C41 to reciprocate relative to the retaining member C2 along the first direction d1, selectively docking with or not docking with the fiber array element W1. The docking component C3 includes a light transmission section C31, a light transmission section C32 connecting the light transmission section C31 and the measurement unit 1, and a guide section C33 that can be selectively inserted into the fiber array element W1. The light transmission section C31 and the guide section C33 are disposed on a docking surface C34 of the docking component C3 facing the retainer C2. The docking surface C34 is inclined from bottom to top towards the retainer C2, and the inclination of the docking surface C34 corresponds to the second side surface W121 of the fiber array element W1. Specifically, the docking surface C34 and the second side surface W121 are parallel to each other. The lead portion C33 is provided with two guide pins C331 spaced apart on both sides of the optical transmission portion C31. The guide pins C331 can be inserted into the guide hole W124 (Fig. 3) of the fiber array element W1. When the docking member C3 docks with the fiber array element W1, the guide pins C331 are inserted into the guide hole W124 and the docking surface C34 is against the second side surface W121, so that the optical transmission portion C31 is exposed in the fiber portion W13 of the socket portion W12, so that the measurement unit 1 (Fig. 15) can supply the optical signal W3 (Fig. 5) to the fiber array element W1.

[0032] Please refer to Figures 14, 16, and 21. The curing component C5 is provided with two first curing elements C51. The two first curing elements C51 are respectively disposed on both sides of the retainer C2 at a distance from each other in the second direction d2. The first curing elements C51 can be tilted towards the first retaining part C21 of the retainer C2 to be irradiated with ultraviolet light C511. In other embodiments of the present invention, the curing component C5 is also provided with a second curing element (not shown in the figure). The second curing element can be tilted towards the second retaining part C22 of the retainer C2 to be irradiated with laser light or blown with hot air.

[0033] In the implementation of this embodiment of the invention, the fiber array element W1 is placed on the first stage 3, and the integrated circuit element W2 is placed on the second stage 4; the linear drive mechanism A drives the inspection mechanism D to move laterally above the second stage 4, and the position of the photonic integrated circuit W23 and / or the lens array W231 and the flatness of the upper surface of the photonic integrated circuit W23 are obtained by the inspection mechanism D in a manner such as, for example, imaging, multi-point ranging, etc., and then recorded by the control unit 7; After obtaining the position of the photonic integrated circuit W23 and / or the lens array W231 and the flatness of the upper surface of the photonic integrated circuit W23, the linear drive mechanism A drives the rotary drive mechanism B to move laterally to the upper part of the first stage 3, and the linear drive mechanism A drives the rotary drive mechanism B to move downward to the upper part of the holding mechanism C so that the holding member C2 contacts the fiber array element W1 on the first stage 3. At the same time, the negative pressure source turns on the negative pressure so that the first holding part C21 and the second holding part C22 of the holding member C2 respectively adsorb the optical coupler part W11 and the socket part W12 of the fiber array element W1. Then, the drive assembly C4 drives the docking member C3 to approach the fiber array element W1 and dock with the fiber array element W1 so that the measurement unit 1 can supply the optical signal W3 to the fiber array element W1. After the docking member C3 docks with the fiber optic array element W1, the linear drive mechanism A drives the rotary drive mechanism B, which in turn drives the holding mechanism C, to move upwards. This causes the holding member C2 to adhere to and hold the fiber optic array element W1, moving it away from the first platform 3. The linear drive mechanism A then drives the rotary drive mechanism B, which in turn drives the holding mechanism C, to move the fiber optic array element W1 laterally to the inspection station 6 to check its orientation. At the inspection station 6, the position of the optical coupler W11 and / or the prism W111 relative to the lower surface of the optical coupler W11 is obtained using methods such as imaging or multi-point ranging. After calibration, the result is recorded by the control unit 7. The control unit 7 can compare the deviation between the position of the optical coupler W11 and / or the prism W111 and the position of the photonic integrated circuit W23 and / or the lens array W231, and control the first rotating component B1 of the rotating drive mechanism B to swing left and right in an arc-shaped path with the first axis L1 as the axis, so as to adjust the posture of the fiber array element W1 held by the holding mechanism C so that the position of the optical coupler W11 and / or the prism W111 can correspond to the position of the photonic integrated circuit W23 and / or the lens array W231.The control unit 7 can compare the deviation between the flatness of the lower surface of the optical coupler W11 and the flatness of the upper surface of the photonic integrated circuit W23, and control the second rotating component B2 of the rotating drive mechanism B to swing up and down in an arc-shaped path with the second axis L2 as the axis, and control the third rotating component B3 to swing forward and backward in an arc-shaped path with the third axis L3 as the axis, so as to adjust the posture of the fiber array element W1 held by the holding mechanism C so that the lower surface of the optical coupler W11 can be parallel to the upper surface of the photonic integrated circuit W23. After the rotary drive mechanism B drives the holding mechanism C to adjust the position and flatness of the fiber array element W1, the linear drive mechanism A drives the rotary drive mechanism B to move laterally to the coating station 5 to apply adhesive. The coating station 5 can accommodate two sets of adhesive valves that respectively hold the first adhesive F1 and the second adhesive F2 to apply the first adhesive F1 and the second adhesive F2 to the lower surfaces of the optical coupler W11 and the socket W12. After the fiber array element W1 is coated with adhesive, the linear drive mechanism A drives the rotary drive mechanism B, which in turn drives the holding mechanism C, to move laterally above the second stage 4. Because the rotary drive mechanism B has previously driven the holding mechanism C to adjust the position of the optical coupler W11 and / or the prism W111 to align with the position of the photonic integrated circuit W23 and / or the lens array W231, and the lower surface of the optical coupler W11 has been adjusted to be parallel to the upper surface of the photonic integrated circuit W23, the linear drive mechanism A can directly move the holding mechanism C above the second stage 4. The actuating mechanism A drives the rotary driving mechanism B to move the holding mechanism C downwards, so that the lower surface of the optical coupler W11 and the lower surface of the socket W12 are respectively adhered to the upper surface of the photonic integrated circuit W23 and the upper surface of the second cover W222 of the cover W22 via the first adhesive material F1 and the second adhesive material F2, so that the optical signal W3 can be transmitted between the fiber array element W1 and the integrated circuit element W2 via the prism W111 and the lens array W231; at this time, the holding mechanism C continues to hold the fiber array element W1 with the holding member C2; After the fiber array element W1 is attached to the integrated circuit element W2, since the first adhesive F1 and the second adhesive F2 have not yet cured and the first adhesive F1 and the second adhesive F2 have a certain thickness, the fiber array element W1 can float on the first adhesive F1 and the second adhesive F2 and can still be adjusted in attitude by the holding mechanism C.At this time, the measurement unit 1 can measure whether the intensity value of the optical signal W3 falls within a preset range. If the intensity value of the optical signal W3 has not yet fallen within the preset range, the control unit 7 controls the rotation drive mechanism B to drive the holding mechanism C to move the fiber array element W1 around the axis Lp as the rotation center, rotating in three degrees of freedom around the first axis L1, the second axis L2, and the third axis L3. While the fiber array element W1 is attached to the integrated circuit element W2, the orientation of the fiber array element W1 is adjusted slightly until the intensity value measured by the measurement unit 1 is within the preset range. When the intensity value of the optical signal W3 falls within the preset range, the rotary drive mechanism B is controlled to stop operating. When the intensity value of the optical signal W3 falls within the preset range, it indicates that the optical signal W3 transmitted between the fiber array element W1 and the integrated circuit element W2 has better transmission efficiency. The operating order of the first rotating component B1, the second rotating component B2, and the third rotating component B3 of the rotary drive mechanism B is as follows: the third rotating component B3 takes priority, followed by the second rotating component B2, and finally the first rotating component B1. If the third rotating component B3 drives the holding mechanism C to move... After the fiber array element W1 rotates about the third axis L3, the intensity value of the optical signal W3 measured by the measurement unit 1 falls within the preset range, so the first rotating component B1 and the second rotating component B2 no longer need to operate. After the rotation drive mechanism B drives the holding mechanism C to adjust the attitude of the fiber array element W1 by a small amplitude, if the intensity value of the optical signal W3 still cannot fall within the preset range, the control unit 7 can control the linear drive mechanism A to drive the rotation drive mechanism B to drive the holding mechanism C to move the fiber array element W1 along the first direction d1 as needed. The linear drive mechanism A and the rotary drive mechanism B continue to control the holding mechanism C to drive the fiber array element W1 to rotate around the first axis L1, the second axis L2, and the third axis L3. While the fiber array element W1 is attached to the integrated circuit element W2, the orientation of the fiber array element W1 is adjusted significantly until the intensity value of the light signal W3 measured by the measuring unit 1 falls within the preset range. At this point, the linear drive mechanism A and the rotary drive mechanism B are stopped. After the intensity value of the light signal W3 falls within the preset range, the curing component C5 uses ultraviolet light C511 and laser light or hot air to cure the first adhesive material F1 and the second adhesive material F2 respectively.Because the optocoupler W11 is made of a light-transmitting material, the ultraviolet light C511 can penetrate the optocoupler W11 and cure the first adhesive F1 between the optocoupler W11 and the photonic integrated circuit W23. Furthermore, because laser light or hot air can generate heat, the second adhesive F2 between the socket W12 and the second cover W222 of the cover W22 can be heated and cured. After the first adhesive F1 and the second adhesive F2 have cured, the drive assembly C4 drives the docking member C3 away from the fiber array element W1, thus disengaging it from the fiber array element W1. After the docking member C3 disengages from the fiber array element W1, the negative pressure source shuts off the negative pressure and the retaining member C2 moves away from the fiber array element W1, completing the process of coupling the fiber array element W1 to the integrated circuit element W2. The linear drive mechanism A and the rotary drive mechanism B of the coupling device 2 can drive the holding mechanism C to sequentially repeat the above actions to couple a preset number of fiber optic array elements W1 to the integrated circuit element W2.

[0034] The rotary drive mechanism, drive method, coupling method and coupling device of the present invention provide a rotary drive mechanism B, drive method, coupling method and coupling device 2 that are different from the prior art and can also perform multi-axial drive, so as to promote industrial development and healthy competition.

[0035] However, the above description is only an embodiment of the present invention and should not be construed as limiting the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification shall still fall within the scope of the patent of the present invention. [Simplified Explanation of the Diagram]

[0036] Figure 1 is an incomplete exploded perspective view illustrating the fiber optic array element and a portion of the integrated circuit element in an embodiment of the present invention. Figure 2 is a partial cross-sectional view illustrating the fiber optic array element coupled to the integrated circuit element. Figure 3 is a perspective view illustrating the fiber optic array element. Figure 4 is a perspective view illustrating the fiber optic array element from a different perspective than Figure 3. Figure 5 is a partial cross-sectional view illustrating the optical signal transmitted between the fiber optic array element and the integrated circuit element. Figure 6 is a perspective view illustrating the coupling device in an embodiment of the present invention. Figure 7 is an exploded perspective view illustrating the third linear motion component, rotary drive mechanism, holding mechanism, and inspection mechanism of the coupling device. Figure 8 is an exploded perspective view illustrating the first rotary component, second rotary component, and third rotary component of the rotary drive mechanism. Figure 9 is a perspective view illustrating the first moving seat of the first rotary component oscillating along a left and right arc-shaped path about a first axis as the axis of rotation of the first base. Figure 10 is a perspective view illustrating the oscillation of the second moving seat system of the second rotating assembly along the second base in an upward and downward arc-shaped path about the second axis. Figure 11 is a perspective view illustrating the oscillation of the third moving seat system of the third rotating assembly along the third base in a forward and backward arc-shaped path about the third axis. Figure 12 is a partial side view illustrating the various connecting surfaces of the rotary drive mechanism. Figure 13 is an incomplete perspective view illustrating the intersection of the first axis, the second axis, and the third axis. Figure 14 is an exploded perspective view illustrating the holding mechanism and its curing assembly. Figure 15 is a partial side view illustrating the holding mechanism and its air passage. Figure 16 is a partial side view illustrating the holding member of the holding mechanism. Figure 17 is an incomplete perspective view illustrating the holding member from an inverted perspective. Figure 18 is a perspective view illustrating the drive assembly of the holding mechanism. Figure 19 is a perspective view illustrating the docking member of the holding mechanism. Figure 20 is a schematic diagram illustrating that the connector can be driven to selectively insert into the fiber array element. Figure 21 is a schematic diagram illustrating ultraviolet light irradiating the fiber array element.

Claims

1. A rotary drive mechanism comprising a plurality of rotary components, each rotary component including: A movable seat that can be driven to move in an arc along a base, the trajectory formed by the arc path of the movable seat being centered on an axis.

2. The rotary drive mechanism as described in claim 1, wherein, The rotating components that make up the drive mechanism are connected by connectors, with the movable seat of one rotating component being connected to the base of another rotating component.

3. The rotary drive mechanism as described in claim 1, wherein, The axes of the plurality of rotating components intersect each other at a single axis point.

4. The rotary drive mechanism as described in claim 3, wherein, A retaining mechanism is provided on the driving mechanism, and the retaining mechanism can be driven by the driving mechanism to rotate around the axis point as the rotation center in multiple axes.

5. The rotary drive mechanism as described in claim 4, wherein, This holding mechanism can hold a fiber optic array element.

6. The rotary drive mechanism as described in claim 1, wherein, The plurality of rotating components includes: three rotating components with different directions of the axis, namely: a first rotating component having a first base and a first movable seat disposed on the first base, wherein the arc-shaped path of the first movable seat moving forms a first trajectory with the first axis as the center; a second rotating component having a second base and a second movable seat disposed on the second base, wherein the arc-shaped path of the second movable seat moving forms a second trajectory with the second axis as the center; and a third rotating component having a third base and a third movable seat disposed on the third base, wherein the arc-shaped path of the third movable seat moving forms a third trajectory with the third axis as the center; the directions of the first axis, the second axis, and the third axis are orthogonal to each other.

7. The rotary drive mechanism as described in claim 6, wherein, The first direction is the horizontal direction; the second direction is the horizontal direction and orthogonal to the first direction; the third direction is the vertical direction and orthogonal to both the first and second directions; the first axis is parallel to the third direction; the second axis is parallel to the first direction; and the third axis is parallel to the second direction.

8. The rotary drive mechanism as described in claim 6, wherein, The plurality of rotating components include: a first connector disposed on the first movable base, a second connector disposed on the second movable base, and a third connector disposed on the third movable base; the second base is disposed on the first connector, and the third base is disposed on the second connector.

9. The rotary drive mechanism as described in claim 8, wherein, The first connector has a vertical first connecting surface and a horizontal second connecting surface; the second connector has a horizontal third connecting surface and an inclined fourth connecting surface; the third connector has an inclined fifth connecting surface and a vertical sixth connecting surface; the first connecting surface is approximately parallel to the sixth connecting surface; the fourth connecting surface is approximately parallel to the fifth connecting surface.

10. The rotary drive mechanism as described in claim 9, wherein, The first connector is disposed on the first movable seat of the first rotating assembly with the first connecting surface; the second rotating assembly is disposed below the first connector, and the second base is disposed on the second connecting surface of the first connector; the second connector is disposed on the second movable seat with the third connecting surface; the third rotating assembly is disposed on the inclined fourth connecting surface of the second connector with the third base; the third connector is disposed on the third movable seat with the inclined fifth connecting surface.

11. The rotary drive mechanism as described in claim 8, wherein, The third connector has an inclined fifth connecting surface and a vertical sixth connecting surface; a holding mechanism for holding an optical fiber array element is provided on the sixth connecting surface of the third connector.

12. The rotary drive mechanism as described in claim 1, wherein, This rotary drive mechanism can be driven to make linear movements in multiple axes.

13. A driving method for moving a fiber optic array element, comprising: An optical fiber array element is held by a holding mechanism, and the holding mechanism is driven by a rotary drive mechanism consisting of a plurality of rotating components; each of the rotating components has a movable seat that can be driven to move in an arc along a base, forming a trajectory centered on an axis to drive the optical fiber array element to move.

14. The driving method as described in request item 13, wherein, The axes of the plurality of rotating components intersect each other at a single axis point.

15. A rotary drive mechanism for performing a drive method as claimed in claim 13 or 14, comprising a plurality of such rotary components.

16. A coupling method applicable to the coupling of fiber optic array elements and integrated circuit elements, comprising: An optical fiber array element is held by a holding mechanism, and a rotary drive mechanism composed of a plurality of rotating components drives the holding mechanism to move the optical fiber array element to an integrated circuit element; a movable seat of each rotating component is driven to move in an arc along a base, and the arc path of the movable seat forms a trajectory with an axis as the center to rotate and move, thereby moving the optical fiber array element to adjust the attitude of the optical fiber array element until the intensity value of an optical signal of the optical fiber array element falls within a preset range.

17. A coupling device for performing the coupling method as claimed in claim 16, comprising the rotary drive mechanism consisting of a plurality of the rotary components.

Images