Optical assembly

TW202634369APending Publication Date: 2026-08-16CARL ZEISS SMT GMBH
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Patent Information

Application Number
TW114141495
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-10-28
Filing Date
2025-10-27
Publication Date
2026-08-16

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Abstract

from the protected side. The result is an optical assembly with high stability.
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