Substrate support manufacturing and / or reconditioning system

TW202634370APending Publication Date: 2026-08-16ASML NETHERLANDS BV
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Patent Information

Application Number
TW114141829
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-10-30
Filing Date
2025-10-29
Publication Date
2026-08-16

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Abstract

A standalone system for manufacturing and / or reconditioning terminal surfaces of a plurality of projections of a substrate support. The system includes one or more rotatable treatment tools arranged to remove matter from the projections of the substrate support when rotating, and a controller arranged to control the operation of the one or more treatment tools.
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