External motor actuator for an x / y stage

Abstract

A positioning system may use an external motor actuator to eliminate an on-board actuator of the x / y-axis stage by connecting to the x / y-axis stage via a beam. The beam may be connected to the motor actuator mounted on a base of the positioning system. The beam may be connected to an upper axis carriage by linear bearings, allowing the x / y-axis stage to move in a perpendicular direction as the x / y-axis stage follows the beam. The positioning system may be used in a processing system to x / y-axis scan the chuck under a processing head.

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