Inspection apparatus, learned model generation apparatus, inspection method, learned model generation method, inspection program, and learned model program

Abstract

This invention improves the reliability of electronic component inspection. The inspection device takes the value obtained by inputting measurement data 50 into a learned model 35, which is represented by the sum of the following two models, adjusts it based on the adjustment value Rtng2, and calculates it as the estimated value Rse of AC resistance. The two models are: a first model f(Rdc4,Rdc2) which uses the first measured value Rdc4 of DC resistance measured by the 4-terminal method and the second measured value Rdc2 of DC resistance measured by the 2-terminal method as explanatory variables and the value of the resistance component caused by the measurement system using the 2-terminal method, i.e., the first resistance value Rc, as the target variable; and a second model g(Ls) which uses the fourth measured value Ls of inductance as explanatory variables and the value of the resistance component caused by the measured object, i.e., the second resistance value Rs0, as the target variable. The adjustment value Rtng2 is calculated based on the difference between the reference AC resistance value and the estimated value g(Ls_av2) of the second resistance value calculated by inputting at least one measurement data 50 into the second model g(Ls).

Images