Using generative artificial intelligence for focus and dose metrology and for generating reference images for charged-particle beam metrology

Abstract

A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform operations for tuning an image processing algorithm with constructed reference images. The operations include: using a decoder of an encoder-decoder model to construct new images having features with known reference values, wherein the encoder-decoder model has been trained with multiple target images with programmed reference values; extracting metrology values from the constructed new images using the encoder; calculating key performance indicators (KPIs) of the new images based on the extracted metrology values; and selecting the constructed new images whose KPIs are within a target range as reference images for tuning parameters of the image processing algorithm.

Images