Magnetic thin film process chamber design for high-density power converters

TW202634635APending Publication Date: 2026-08-16APPLIED MATERIALS INC +1
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Patent Information

Application Number
TW114137833
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-04
Filing Date
2025-10-01
Publication Date
2026-08-16

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Abstract

A toroidal inductor may include a substrate. The toroidal inductor may also include a magnetic film deposited on the substrate during a manufacturing process, wherein the substrate is exposed to one or more magnetic fields creating local and / or spatially-variant anisotropy. The toroidal inductor may also include one or more metal windings deposited on the substrate corresponding to the spatially-variant anisotropy.
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