Method for passively aligning a particle-optical component for a functional unit of a particle beam system, in particular of a pole shoe for a magnetic lens, method for equipping a particle beam system with the functional unit, in particular a magnetic lens, and particle beam system

Abstract

The invention relates to a method for passively aligning a pole shoe for a magnetic lens of a particle beam system, including the following steps: providing a reference pole shoe with a predefined minimum magnetic homogeneity in a measuring device; releasably arranging the pole shoe to be aligned relative to the reference pole shoe in a predefined reference position and thereby assembling a magnetic lens in the measuring device; exciting the magnetic lens in the measuring device; measuring characteristics of the magnetic field generated by the magnetic lens; determining a deviation of the characteristics of the generated magnetic field from corresponding characteristics of a predefined reference magnetic field; and mechanically modifying the pole shoe on the basis of the ascertained deviation in order to adapt the magnetic field that can be generated by the magnetic lens.

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