Electrical characteristic testing device and electrical characteristic testing method

Abstract

An electrical characteristic detection device is provided that can detect and measure the electrical characteristics of a sample under arbitrary applied voltage (bias voltage) or applied current (bias current) conditions. The device comprises: a charged particle source that irradiates a beam of charged particles onto a measurement point set on the sample under predetermined optical conditions; a detector that detects the secondary electron current emitted when the charged particle beam is irradiated at the measurement point and outputs a detection signal; and a computing unit that includes a processor and a memory unit. The memory unit stores a target value of the voltage or current applied to the measurement point, i.e., a first applied voltage or a first applied current. The processor calculates an estimated voltage or current value applied to the measurement point, i.e., a second applied voltage or a second applied current, based on the detection signal from the detector. The processor changes the predetermined optical conditions to reduce the difference between the first applied voltage value and the second applied voltage value, or the difference between the first applied current value and the second applied current value.

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