High power 193 nanometer continuous-wave laser light

TW202634715APending Publication Date: 2026-08-16KLA CORP
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Patent Information

Application Number
TW114144405
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-11-04
Filing Date
2025-11-14
Publication Date
2026-08-16

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Abstract

W or higher. A first non-linear optical (NLO) crystal mixes a first enhanced CW light portion and the first CW light to generate sum-frequency generation (SFG) light having a second DUV wavelength. A second NLO crystal mixes a second enhanced CW light portion and the SFG light to generate output CW light at approximately
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