Module retainer
TW202635043APending Publication Date: 2026-08-16ENTEGRIS INC
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Patent Information
- Application Number
- TW115116611
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-04-26
- Filing Date
- 2024-07-19
- Publication Date
- 2026-08-16
Smart Images
Figure TWG2TA001073570_001 
Figure TWG2TA001073570_002 
Figure TWG2TA001073570_003
Abstract
A module retainer is provided that can be rotatably attached to a purge module. The module retainer includes one or more engagement features configured to be inserted through openings provided in a substrate container and to engage tabs when rotated following insertion through the openings. The module retainer can be rotatable with respect to the purge module such that rotation between the insertion position and the retention position can be performed without affecting an orientation of the purge module.
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