Substrate processing apparatus, substrate processing method and memory medium

Abstract

This invention relates to a device that supplies a more stable microbubble solution. The substrate processing device provided in this invention includes: a first substrate detection unit that detects the substrate in a first module used in the first step; a bubble measuring unit that, in response to the detection of the substrate by the first substrate detection unit, measures the amount of bubbles in the piping supplying the microbubble solution to the second module used in the second step after the first step; and a control unit that controls the amount of bubbles in response to the measurement result of the bubble measuring unit.

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