Substrate processing system, apparatus, and method for determining the placement state of annular members

Abstract

This invention provides a technique for determining the setting state of an annular member in a substrate processing system. The substrate processing system includes a substrate processing chamber, a substrate support section, a transfer chamber, a transfer robot, and a control section; and the control section is configured to perform: moving at least one displacement sensor above the annular member in the substrate processing chamber by a transfer arm, measuring the height of a plurality of parts on the annular member by the at least one displacement sensor; and determining the setting state of the annular member based on the measured height of the plurality of parts.

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