Air curtain device

Abstract

An air curtain device includes: a first air chamber, a second air chamber, and a third air chamber connected in communication, and a diffusion element. The first air chamber is connected to a gas source for receiving a gas. The diffusion element is disposed between the second and third air chambers for uniformly supplying gas from the second air chamber to the third air chamber. The third air chamber has an internal flow channel with a first end and an opposing second end. The first end is connected to the second air chamber via the diffusion element, and the second end is defined by a vertical wall and an inclined wall. The air curtain device supplies gas towards a substrate carrier at an inclined angle through the second end.

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