Coupler for a slit valve gate having a rotatable joint

Abstract

A slit valve coupler includes a first interface component configured to couple to a slit valve actuator and a second interface component configured to couple to a slit valve gate. The slit valve coupler further includes a cross-shaped member at least partially forming a rotatable joint between the first interface component and the second interface component. The slit valve coupler further includes one or more clamp members configured to couple the first interface component to the second interface component and to apply a clamping force to the cross-shaped member disposed between the first interface component and the second interface component. The second interface component is configured to self-align, via the rotatable joint, the slit valve gate with respect to a sealing surface of a slit valve opening responsive to a threshold closing force provided by the slit valve actuator.

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