Method for controlling equipment front end module

Abstract

The present invention relates to a method of controlling a substrate transfer apparatus, and the method of controlling a substrate transfer apparatus according to one aspect of the present invention relates to a method performed by a substrate transfer apparatus equipped with a flipper, the method including generating sequences that include values of a substrate sequence number, a process to be performed on each surface of a glass substrate, and whether inspection is to be performed, according to a preset number of substrates to be processed received from a user, processing the sequences, determining, according to a processing order sequence, whether a current surface of a loaded glass substrate corresponds to a processing surface, operating a flipper to invert the loaded glass substrate when it is determined not to correspond to the processing surface, delivering the glass substrate to equipment connected to the substrate transfer apparatus and performing a process according to the processing order sequence, determining whether a value of inspection in the processing order sequence corresponds to inspection, and when it is determined to correspond to inspection, inspecting the processing surface of the glass substrate and outputting an inspection result.

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