Dbi to si bonding for simplified handle wafer

TW202635102APending Publication Date: 2026-08-16AMERICAN CO ADIA SEMICON BONDING TECH CO LTD
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Patent Information

Application Number
TW115116698
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2019-04-17
Filing Date
2019-04-19
Publication Date
2026-08-16

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Abstract

Devices and techniques include process steps for preparing various microelectronic components for bonding, such as for direct bonding without adhesive. The processes include providing a first bonding surface on a first surface of the microelectronic components, bonding a handle to the prepared first bonding surface, and processing a second surface of the microelectronic components while the microelectronic components are gripped at the handle. In some embodiments, the processes include removing the handle from the first bonding surface, and directly bonding the microelectronic components at the first bonding surface to other microelectronic components.
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