Probe card for inspecting photographic components

Abstract

The probe card (100) for inspecting photographic elements of the present invention includes: a plurality of probes (12); a main substrate (20) electrically connected to the plurality of probes (12); and a plurality of pupil lenses (L) that respectively irradiate diffused light onto each of the plurality of photographic elements (1) formed on a wafer (W). The pupil lens (L) is composed of a lower lens (11) and an upper lens (41). The pupil lens (L) has an optical axis (Q) that passes through the main substrate (20) and is perpendicular to the surface of the main substrate (20). The lower lens (11) and the upper lens (41) are respectively positioned relative to the main substrate (20). A probe card (100) for inspecting photographic components includes a plurality of probes (12); a main substrate (20) electrically connected to the plurality of probes (12); and a plurality of pupil lenses (L) that respectively irradiate diffused light onto each of the plurality of photographic components (1) formed on a wafer (W). Each pupil lens (L) is composed of a lower lens (11) and an upper lens (41), and has an optical axis (Q) that penetrates the main substrate (20) and is perpendicular to the surface of the main substrate (20). The lower lens (11) and the upper lens (41) are respectively positioned relative to the main substrate (20).

Images