Method of selecting a focal position of a charged particle-optical device, and charged particle-optical device

TW202635119APending Publication Date: 2026-08-16ASML NETHERLANDS BV
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Patent Information

Application Number
TW114146580
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-02
Filing Date
2025-11-28
Publication Date
2026-08-16

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Abstract

A method of selecting a focal position of a charged particle-optical device, the method comprising: directing a charged particle beam towards a target surface and detecting a detection signal resulting therefrom while varying the focal position of the charged particle beam through a range of focal positions, thereby generating a plurality of detection signals associated with the respective focal positions; and selecting a focal position of the charged particle-optical device, wherein the selected focal position corresponds to a dip in the detection signal across the range of focal positions.
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