Method of manufacturing metal layer having increased oxidation resistance and method of manufacturing semiconductor package
TW202635170APending Publication Date: 2026-08-16SAMSUNG ELECTRONICS CO LTD +1
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Patent Information
- Application Number
- TW115101329
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-04-25
- Filing Date
- 2026-01-14
- Publication Date
- 2026-08-16
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Abstract
A method of manufacturing a metal layer having increased oxidation resistance is presented. The method includes allowing an electride layer and a metal layer to be in contact with each other and annealing the electride layer and the metal layer such that the metal layer is reduced by the electride layer. A method of manufacturing a semiconductor package is also provided.
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