Sealing components and substrate processing apparatus

TW202635191APending Publication Date: 2026-08-16TOKYO ELECTRON LTD
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Patent Information

Application Number
TW115102920
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2026-01-21
Filing Date
2026-01-26
Publication Date
2026-08-16

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Abstract

A sealing member and a substrate processing apparatus for improving sealing performance are provided. An annular sealing member has: a first annular portion made of a first material; and a second annular portion made of a second material different from the first material.
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