Equipped with a voltage-stabilized and high-efficiency condensation absorption demisting device

Abstract

A high-efficiency, voltage-stabilized condensation absorption demister can be applied to the purification of organic waste gas discharged from photoresist removal equipment in semiconductor wafer manufacturing processes. The key feature is that the bypass balancing duct remains constantly open. Assuming pressure fluctuations occur in the condensation absorption demister unit due to pressure loss, the static pressure in the first duct is measured by a pressure gauge. This pressure is then used in conjunction with a control unit to dynamically adjust the fan speed using a frequency converter. Furthermore, the organic waste gas from the first duct can bypass the balancing duct to the second duct to compensate for the airflow, ensuring that pressure fluctuations in the process piping remain within acceptable limits. This stabilizes the airflow distribution in the piping and maintains process yield. The invention also provides a method for airflow bypass compensation in the condensation absorption demister.

Description

[Technical Field]

[0001] This invention relates to the purification and treatment of organic waste gas, and more particularly to a condensation absorption and demisting device with stable pressure and high efficiency and its air volume bypass compensation method. [Previous Technology]

[0002] In the panel manufacturing process of semiconductor wafer manufacturing plants and TFT-LCD panel optoelectronic manufacturing industry, the stripper used in the stripping process is mainly composed of high-boiling-point organic compounds that are almost completely soluble in water, such as monoethanolamine (MEA), dimethyl sulfide (DMSO), and ethylene glycol monobutyl ether (BDG). Among them, monoethanolamine (MEA) is a polymer that can clog the micropores of the adsorbent and affect the service life of the adsorbent. Dimethyl sulfide (DMSO) remains in the micropores of the zeolite rotor adsorbent. Due to the catalytic effect of zeolite, the sulfur (S) precipitated in the dimethyl sulfide is triggered to generate a hot spark, which causes the rotor to smolder. Therefore, it is necessary to remove and purify it.

[0003] It is known that the purification process for removing organic waste gas from photoresist removal equipment commonly uses a condenser-demist system, which combines a condenser and a demist to remove volatile organic compounds. The organic waste gas is introduced into the condenser-demist system by a fan at the front end, and purification is achieved through the condensation and demisting process. However, when the fan starts, stops, or malfunctions, the pressure difference in the demist system increases due to the fan's load changes or the adhesion of dirt from the high-boiling-point photoresist remover. This results in excessive pressure fluctuations during the purification process of the organic waste gas in semiconductor manufacturing equipment, leading to uneven airflow distribution and consequently affecting the product yield of semiconductor wafer manufacturing.

[0004] Furthermore, even if the condensation and demisting equipment is equipped with a ventilation pipe at the rear end of the windmill to facilitate switching to maintenance mode, the ventilation pipe will inevitably have an on / off valve to control whether airflow can pass through it. However, due to the opening and closing action of the valve and the effects of windmill loading and unloading, the semiconductor process equipment will still experience excessive pressure fluctuations and uneven airflow distribution, thereby affecting product yield. Therefore, how to solve the above-mentioned problems of the prior art is the focus of this invention. [Summary of the Invention]

[0005] To solve the above problems, the inventors provide a condensation absorption demisting device with stable and high efficiency and its airflow bypass compensation method, which can purify and discharge the organic waste gas discharged from the photoresist removal machine in the semiconductor wafer process through condensation absorption and demisting, and the pressure fluctuation of the organic waste gas during the condensation and demisting process can be maintained within the allowable range.

[0006] To achieve the above objectives, the present invention provides a condensation absorption demisting device with stable voltage and high efficiency, which can be applied to the purification of organic waste gas discharged from a light-blocking machine. The device includes a condensation absorption demisting unit, a first pipeline, a second pipeline, a bypass balancing duct, and a control unit.

[0007] The first pipeline includes an input end connected to the photoresist removal machine and a first connection end connected to one input side of the condensation absorption demisting unit. The organic waste gas discharged by the photoresist removal machine is input into the first pipeline through the input end and enters the condensation absorption demisting unit through the first connection end. A pressure gauge is provided between the input end and the first connection end of the first pipeline to sense the static pressure of the organic waste gas when it flows in the first pipeline.

[0008] The second pipeline includes a second connection end connected to one of the output sides of the condensation absorption and demisting unit, and an output end connected to an exhaust pipe. After the organic waste gas is condensed and demisted by the condensation absorption and demisting unit, it is input into the second pipeline through the second connection end and discharged through the exhaust pipe after passing through the output end. A fan is provided between the second connection end and the output end of the second pipeline to generate the airflow of the organic waste gas from the input end to the output end. The fan is electrically connected to a frequency converter to control the speed of the fan and adjust the airflow.

[0009] The bypass balancing duct has an inlet end and an outlet end at its two opposite ends, wherein the inlet end is connected to the first pipeline between the pressure gauge and the condensation absorption and demisting unit or a pipeline connected to the first pipeline, and the outlet end is connected between the fan and the output end in the second pipeline. The inlet end and the output end are kept open by the bypass balancing duct and are not closed.

[0010] The control unit is electrically connected to the pressure gauge, the windmill and the frequency converter. The pressure gauge senses the static pressure in real time, and the control unit controls the frequency converter to dynamically adjust the speed of the windmill according to the sensing result of the pressure gauge. The organic waste gas from the first pipeline can be bypassed from the bypass balancing duct to the second pipeline to compensate for the air volume, so that the static pressure can be kept within an allowable range of pressure fluctuation.

[0011] In one embodiment, the condensation absorption demisting unit includes a condenser and a demisting device connected in series by a connecting pipe. The condenser has an input side connected to the first connection end, and the demisting device has an output side connected to the second connection end. The inlet end is connected between the pressure gauge and the first connection end in the first pipeline.

[0012] In one embodiment, the first pipeline includes a first front section pipe and a first rear section pipe, the first front section pipe is connected to the inlet end of the bypass balancing duct, and the first front section pipe and the first rear section pipe are connected to each other by a first branch pipe; the second pipeline includes a second front section pipe and a second rear section pipe, the second rear section pipe is connected to the outlet end of the bypass balancing duct, and the second front section pipe and the second rear section pipe are connected to each other by a second branch pipe.

[0013] In one embodiment, the first front section pipe and the bypass balancing duct are connected to each other and are straight pipes, the first rear section pipe is connected to the first branch pipe and is perpendicular to the first front section pipe and the bypass balancing duct, so that the first front section pipe, the bypass balancing duct and the first rear section pipe are T-shaped; the second rear section pipe and the bypass balancing duct are connected to each other and are straight pipes, the second front section pipe is connected to the second branch pipe and is perpendicular to the second rear section pipe and the bypass balancing duct, so that the second rear section pipe, the bypass balancing duct and the second front section pipe are T-shaped.

[0014] In one embodiment, the first branch pipe is tilted at a first angle of less than 90 degrees relative to the bypass balancing duct, and the organic waste gas from the light-blocking machine is introduced into the first rear section pipe from the first front section pipe in the direction of flow along the first branch pipe.

[0015] In one embodiment, the second branch pipe is inclined at a second angle of less than 90 degrees relative to the bypass balancing duct. The organic waste gas output by the demister is introduced into the second rear section pipe through the second front section pipe in the direction of the flow and then discharged from the exhaust pipe.

[0016] In one embodiment, the first angle or the second angle is between 30 degrees and 60 degrees.

[0017] The present invention further provides a method for airflow bypass compensation of the aforementioned condensation absorption demisting device, comprising the steps of generating airflow, pressure detection, and airflow compensation. The step of generating airflow involves driving the fan through the control unit to generate airflow of the organic waste gas flowing from the first pipe to the exhaust pipe; the step of pressure detection involves sensing the static pressure of the organic waste gas flowing in the first pipe through the pressure gauge; the step of airflow compensation involves the control unit generating a control signal based on the static pressure measured by the pressure gauge and transmitting it to the frequency converter to dynamically adjust the fan speed, and the organic waste gas from the first pipe bypassing the bypass balancing duct to the second pipe to compensate for the airflow, so that the static pressure can be maintained within an allowable range of pressure fluctuations.

[0018] In one embodiment, the allowable range is greater than or equal to 0 Pa and less than 20 Pa.

[0019] In one embodiment, the control unit is a PIC microcontroller. The control unit controls the frequency converter to dynamically adjust the speed of the windmill based on the static pressure measured by the pressure gauge and through PID (proportional-integral-derivative) calculation.

[0020] Accordingly, the present invention eliminates the need for a front-end fan between the photoresist removal machine and the condensation absorption demisting unit, thereby avoiding the influence of the fan's load change on the distribution of organic waste gas flow due to the start-up, stop, or malfunction of the front-end fan. If the condensation absorption demisting device malfunctions and cannot circulate gas normally due to maintenance or repair, the control unit can control the inverter to dynamically adjust the fan speed and compensate for the required air volume from the bypass balancing duct, thereby maintaining the static pressure within the allowable range of pressure fluctuations. This ensures that the organic waste gas can achieve uniform airflow distribution between the input end of the first pipeline and the output end of the second pipeline, thereby maintaining the yield of the semiconductor wafer manufacturing process.

Implementation Method

[0021] To fully understand the purpose, features, and effects of the present invention, the present invention will be described in detail below with reference to the following specific embodiments and accompanying drawings:

[0022] Please refer to Figures 1 to 7. The present invention provides a voltage-stabilized and high-efficiency condensation absorption demisting device 100 and its airflow bypass compensation method 200, which is applied to the purification of organic waste gas discharged from the light-blocking machine 300. The organic waste gas contains organic substances such as monoethanolamine (MEA), dimethyl sulfoxide (DMSO) and ethylene glycol monobutyl ether (BDG) and other high-boiling-point organic substances. However, the organic waste gas to be purified by the present invention is not limited to the organic substances listed above.

[0023] This invention provides a voltage-stabilized and high-efficiency condensation absorption demisting device 100 and its airflow bypass compensation method 200. Figures 1 to 3 show the first embodiment, which includes a condensation absorption demisting unit 10, a first pipeline 20, a second pipeline 30, a bypass balancing duct 40, and a control unit 50, wherein:

[0024] The first pipeline 20 includes an input end 21 connected to the photoresist removal machine 300 and a first connection end 22 connected to one input side 11 of the condensation absorption and demisting unit 10. The organic waste gas discharged by the photoresist removal machine 300 is input into the first pipeline 20 through the input end 21 and flows into the condensation absorption and demisting unit 10 through the first connection end 22. A pressure gauge 23 is provided between the input end 21 and the first connection end 22 in the first pipeline 20 to sense the static pressure of the organic waste gas when it flows in the first pipeline 20.

[0025] The second pipeline 30 includes a second connection end 31 connected to the output side 12 of the condensation absorption and demisting unit 10, and an output end 32 connected to an exhaust pipe OP. After the organic waste gas is condensed and demisted by the condensation absorption and demisting unit 10, it is input into the second pipeline 30 through the second connection end 31 and discharged through the exhaust pipe OP via the output end 32. A fan 33 is provided between the second connection end 31 and the output end 32 in the second pipeline 30. The fan 33 generates the airflow of the organic waste gas from the input end 21 to the output end 32. The fan 33 is electrically connected to a frequency converter 34 to control the speed of the fan 33 and adjust the airflow.

[0026] The bypass balancing duct 40 has an inlet end 41 and an outlet end 42 at its opposite ends. The inlet end 41 is connected to the first pipeline 20 between the pressure gauge 23 and the condensation absorption and demisting unit 10 (as shown in Figure 1), or to a pipe T connected to the first pipeline 20 (as shown in Figures 3 and 4). The outlet end 42 is connected to the second pipeline 30 between the fan 33 and the output end 32. The input end 21 and the output end 32 are kept open by the bypass balancing duct 40 and are not closed. The bypass balancing duct 40 is kept open and not closed, meaning that no components that reduce or stop the flow of fluid, such as windmills or valves, are installed between the input end 21 and the inlet end 41 of the bypass balancing duct 40, the bypass balancing duct 40 itself, and the outlet end 42 and the output end 32 of the bypass balancing duct 40, so as to keep the airflow between the input end 21, the bypass balancing duct 40 and the output end 32 unobstructed.

[0027] The control unit 50 is electrically connected to the pressure gauge 23, the fan 33, and the frequency converter 34. Based on the static pressure measured by the pressure gauge 23, the control unit 50 controls the frequency converter 34 to dynamically adjust the speed of the fan 33. The organic waste gas from the first pipeline 20 can bypass the balancing duct 40 to the second pipeline 30 to compensate for the airflow, ensuring that the static pressure meets one of the allowable pressure fluctuation ranges. In one embodiment, the control unit 50 is a PIC microcontroller. Based on the static pressure measured by the pressure gauge 23, it controls the frequency converter 34 to dynamically adjust the speed of the fan 33 through, for example, PID (proportional-integral-derivative) calculations.

[0028] In one embodiment, the condensation absorption demisting unit 10 includes a condenser 60 and a demister 70, connected in series by a connecting pipe 13 as shown in FIG2. The condenser 60 has an input side 11 connected to a first connection end 22, while the demister 70 has an output side 12 connected to a second connection end 31. The inlet end 41 is connected between the pressure gauge 23 and the first connection end 22 via the first pipe 20. The condenser 60 contains a coil for condensation (not shown in the figure). Furthermore, the demister 70 in this embodiment is a general demister.

[0029] In one embodiment, the first pipeline 20 includes a first front section pipe 24 and a first rear section pipe 25. The first front section pipe 24 is connected to the inlet end 41 of the bypass balancing duct 40, and the first front section pipe 24 and the first rear section pipe 25 are connected to each other by a first branch pipe 26. The second pipeline 30 includes a second front section pipe 35 and a second rear section pipe 36. The second rear section pipe 36 is connected to the outlet end 42 of the bypass balancing duct 40, and the second front section pipe 35 and the second rear section pipe 36 are connected to each other by a second branch pipe 37. In one embodiment, an on / off valve can be installed on the first rear section pipe 25 of the first pipeline 20, and an on / off valve can be installed on the second front section pipe 35 of the second pipeline 30 behind the wind turbine 33 to meet the needs of practical applications.

[0030] In one embodiment, the first front section pipe 24 and the bypass balancing air duct 40 are connected to each other and are in the form of a straight pipe. The first rear section pipe 25 is connected to the first branch pipe 26 and is perpendicular to the first front section pipe 24 and the bypass balancing air duct 40, so that the first front section pipe 24, the bypass balancing air duct 40 and the first rear section pipe 25 are in the form of a T-shape. The second rear section pipe 36 and the bypass balancing air duct 40 are connected to each other and are in the form of a straight pipe. The second front section pipe 35 is connected to the second branch pipe 37 and is perpendicular to the second rear section pipe 36 and the bypass balancing air duct 40, so that the second rear section pipe 36, the bypass balancing air duct 40 and the second front section pipe 35 are in the form of a T-shape.

[0031] The present invention further provides an airflow bypass compensation method 200 for the aforementioned condensation absorption demisting device 100, as shown in FIG3, including the steps of generating airflow S01, pressure detection S02, and airflow compensation S03, wherein:

[0032] In the step of generating air volume S01, the fan 33 is driven by the control unit 50 to generate the air volume of the organic waste gas flowing from the first pipeline 20 to the exhaust pipe OP. Assuming the airflow generated by wind turbine 33 is 3840 CMH (allowable fluctuation range ±4%), and the static pressure measured by the pressure gauge is -400 Pa (allowable fluctuation range ±10 Pa), and assuming a clean and unobstructed initial state, the normal pressure difference of the organic waste gas through the coil of condenser 60 is approximately 25 Pa, the normal pressure difference through demister 70 is approximately 300 Pa, and the normal pressure difference through bypass balancing duct 40 is approximately 0-50 Pa, and the wind speed at the first branch pipe 26 and the second branch pipe 37 is 8 m / s, the organic waste gas is then introduced into condenser 60 via the first front pipe 24 and the first rear pipe 25 for condensation and absorption of organic matter in the gas, then demisted by demister 70, and finally discharged through the second front pipe 35 and the second rear pipe 36 to exhaust through exhaust pipe OP, and the airflow measured at the exhaust pipe OP will remain at 3840 CMH. CMH, while the static pressure is -450pa.

[0033] In the pressure detection step S02, the static pressure of the organic waste gas flowing in the first pipeline 20 is sensed by the pressure gauge 23. In the airflow compensation step S03, the control unit 50 generates a control signal based on the static pressure measured by the pressure gauge 23 and transmits it to the frequency converter 34 to dynamically adjust the rotation speed of the fan 33. The organic waste gas from the first pipeline 20 is bypassed from the bypass balancing duct 40 to the second pipeline 30 to compensate for the airflow, so that the static pressure can meet an allowable range of pressure fluctuation. In one embodiment, the allowable range is greater than or equal to 0 Pa and less than 20 Pa. As shown in Figure 3, the airflow bypass compensation method 200 performs the following steps: after generating airflow S01, it detects the change in static pressure in real time through the pressure detection S02 step, and dynamically adjusts the rotation speed of the wind turbine 33 to compensate for the airflow in the airflow compensation S03 step. The pressure detection S02 and airflow compensation S03 steps are executed in a cyclical manner to maintain the pressure fluctuation within the allowable range.

[0034] After a period of use, the pressure difference between the organic waste gas passing through the condenser 60, demister 70, and bypass balancing duct 40 will increase. This increase is most pronounced in the demister 70, where the pressure difference rises most significantly due to the adhesion of high-boiling-point anti-light-blocking liquid. Therefore, when the fan 33 generates the airflow of the organic waste gas, to avoid the reduced airflow caused by the pressure difference between the condenser 60, demister 70, and bypass balancing duct 40, especially the significant impact of the pressure difference in the demister 70, which would otherwise lead to an increase in static pressure, the fan 33 must ensure adequate airflow through the condenser 60 and bypass balancing duct 40.

[0035] Continuing from the above, through the pressure-stabilizing and high-efficiency condensation absorption demisting device 100 of the present invention, and by executing the airflow bypass compensation method 200, since the bypass balancing duct 40 is kept open and not closed, the second pipeline 30 is thus connected to the first pipeline 20 through the bypass balancing duct 40. The organic waste gas in the first pipeline 20 can be bypassed and compensated to the second pipeline 30 through the bypass balancing duct 40 to make up for the airflow reduced by the pressure difference between the condenser 60, the demister 70 and the bypass balancing duct 40. In conjunction with the control unit 50, based on the static pressure measured in real time by the pressure gauge 23, a control signal is generated and transmitted to the frequency converter 34 to dynamically adjust the speed of the fan 33, so that the airflow and static pressure can be kept stable within the allowable range of pressure fluctuation.

[0036] It is not difficult to see from the above description that the feature of the present invention is that, when the semiconductor wafer manufacturing equipment continues to produce without stopping, if the condensation absorption demisting device 100 fails to malfunction for repair or maintenance and cannot flow gas normally, the pressure gauge 23 will sense the pressure fluctuation of the static pressure in the first pipeline 20, and the control unit 50 will control the inverter 34 to adjust the speed of the fan 33. Since the bypass balance air duct 40 is always open, it can immediately conduct the organic waste gas from the first pipeline 20 to compensate for the required air volume, thereby maintaining the pressure fluctuation of the static pressure within the allowable range. The process of organic waste gas entering from the first pipeline 20, being condensed and demisted by the condensation absorption demisting unit 10, and then being discharged through the second pipeline 30 to the exhaust pipe OP can achieve uniform airflow distribution, thereby maintaining the yield of the semiconductor wafer manufacturing process.

[0037] Furthermore, the organic waste gas generated by the photoresist removal machine 300 in the semiconductor wafer manufacturing process can be fed into the first pipe 20 and condensed and demisted by the fluid power generated by the operation of the fan 33 in the second pipe 30, and then discharged through the exhaust pipe OP via the second pipe 30. This eliminates the need for a front-end fan between the photoresist removal machine 300 and the condensation absorption and demisting unit 10, as is done in the prior art, thereby avoiding the influence of the fan load on the airflow distribution of the organic waste gas due to the start-up, stop, or failure of the front-end fan.

[0038] As shown in Figure 4, this is the second embodiment of the present invention. The main difference between this embodiment and the first embodiment is that the inlet end 41 of the bypass balancing duct 40 is connected to the section of the pipe T located after the condenser 60 and before the demister 70. Since the pipe T is connected to the first pipe 20, the organic waste gas flowing in the first pipe 20 can also bypass from the pipe T through the bypass balancing duct 40 to the second pipe 30, thereby achieving the same effect as the first embodiment.

[0039] As shown in Figure 5, this is the third embodiment of the present invention. The main difference between this embodiment and the previous embodiment is that the inlet end 41 of the bypass balancing duct 40 is connected to the section of the pipe T located in the demister 70. As mentioned above, the organic waste gas flowing in the first pipe 20 can also bypass from the pipe T through the bypass balancing duct 40 to the second pipe 30, thereby achieving the same effect as the first embodiment.

[0040] As shown in Figure 6, this is the fourth embodiment of the present invention. The main difference between this embodiment and the first embodiment is that the first branch pipe 26 is inclined at a first angle θ1 relative to the bypass balancing duct 40, and the second branch pipe 37 is inclined at a second angle θ2 relative to the bypass balancing duct 40. The first angle θ1 and the second angle θ2 must be less than 90 degrees. In this embodiment, the first angle θ1 and the second angle θ2 are both 45 degrees. This allows the organic waste gas from the photoresist machine 300 to be passed from the first front pipe 24 in the direction of flow along the first branch pipe 26 into the first rear pipe 25. The organic waste gas output by the demister 70 is passed from the second front pipe 35 in the direction of flow along the second branch pipe 37 into the second rear pipe 36 and then discharged from the exhaust pipe OP, so as to avoid the influence of wind speed dynamic pressure on static pressure. Furthermore, a new demister 80 is added in this embodiment. This demister 80 is a high-efficiency demister, which has a more efficient demisting effect than the demister 70.

[0041] As shown in Figure 7, this is the fifth embodiment of the present invention. The main difference between this embodiment and the fourth embodiment is that the first angle θ1 and the second angle θ2 are adjusted to 30 degrees. According to the above fourth and fifth embodiments, although the first angle θ1 or the second angle θ2 is 45 degrees or 30 degrees respectively, the present invention is not limited thereto. As long as the first angle θ1 or the second angle θ2 is less than 90 degrees, it will help to avoid the influence of wind speed dynamic pressure on static pressure, and it is preferable that the first angle θ1 or the second angle θ2 is between 30 degrees and 60 degrees.

[0042] The present invention has been disclosed above with reference to preferred embodiments. However, those skilled in the art should understand that the embodiments are only used to depict the present invention and should not be construed as limiting the scope of the present invention. It should be noted that all variations and substitutions equivalent to the embodiments should be included within the scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the claims. [Simplified Explanation of the Diagram]

[0043] Figure 1 is a schematic diagram of the system architecture of the first embodiment of the present invention. Figure 2 is an actual structural diagram of the condensation absorption demisting device of the first embodiment of the present invention. Figure 3 is a flowchart of the airflow bypass compensation method of a specific embodiment of the present invention. Figure 4 is a schematic diagram of the system architecture of the second embodiment of the present invention. Figure 5 is a schematic diagram of the system architecture of the third embodiment of the present invention. Figure 6 is a schematic diagram of the system architecture of the fourth embodiment of the present invention. Figure 7 is a schematic diagram of the system architecture of the fifth embodiment of the present invention.

Claims

1. A voltage-stabilized and high-efficiency condensation absorption demisting device, applicable to the purification of organic waste gas discharged from a photoresist removal machine, the device comprising: A condensation absorption demisting unit; A first pipeline includes an input end connected to the photoresist removal machine and a first connection end connected to an input side of the condensation absorption and demisting unit. The organic waste gas discharged by the photoresist removal machine is input into the first pipeline through the input end and flows into the condensation absorption and demisting unit through the first connection end. A pressure gauge is provided between the input end and the first connection end of the first pipeline to sense the static pressure of the organic waste gas flowing in the first pipeline. A second pipeline includes a second connection end connected to one output side of the condensation absorption and demisting unit, and an output end connected to an exhaust pipe. After the organic waste gas is condensed and demisted by the condensation absorption and demisting unit, it is input into the second pipeline through the second connection end and discharged through the exhaust pipe after passing through the output end. A fan is provided between the second connection end and the output end of the second pipeline to generate the airflow of the organic waste gas from the input end to the output end. The fan is electrically connected to a frequency converter to control the speed of the fan and adjust the airflow. A bypass balancing duct has an inlet end and an outlet end at opposite ends. The inlet end is connected to a first pipeline or a pipe connected to the first pipeline between the pressure gauge and the condensation absorption and demisting unit. The outlet end is connected to the second pipeline between the fan and the output end. The inlet end and the output end are kept open by the bypass balancing duct. A control unit is electrically connected to the pressure gauge, the fan, and the frequency converter. The pressure gauge senses the static pressure in real time, and the control unit controls the frequency converter to dynamically adjust the speed of the fan based on the sensing result of the pressure gauge. The organic waste gas from the first pipeline can bypass the bypass balancing duct to the second pipeline to compensate for the air volume, so that the static pressure can be maintained within an allowable range of pressure fluctuation. The condensation absorption demisting unit includes a condenser and a demisting device connected in series by a connecting pipe. The condenser has an input side connected to the first connection end, and the demisting device has an output side connected to the second connection end. The inlet end is connected between the pressure gauge and the first connection end in the first pipeline.

2. The voltage-stabilized and high-efficiency condensation absorption demisting device as described in claim 1, wherein, The first pipeline includes a first front section pipe and a first rear section pipe. The first front section pipe is connected to the inlet end of the bypass balancing duct, and the first front section pipe and the first rear section pipe are connected to each other by a first branch pipe. The second pipeline includes a second front section pipe and a second rear section pipe. The second rear section pipe is connected to the outlet end of the bypass balancing duct, and the second front section pipe and the second rear section pipe are connected to each other by a second branch pipe.

3. The voltage-stabilized and high-efficiency condensation absorption demisting device as described in claim 2, wherein, The first front section pipe and the bypass balancing duct are connected to each other and are straight pipes. The first rear section pipe is connected to the first branch pipe and is perpendicular to the first front section pipe and the bypass balancing duct, so that the first front section pipe, the bypass balancing duct and the first rear section pipe are T-shaped. The second rear section pipe and the bypass balancing duct are connected to each other and are straight pipes. The second front section pipe is connected to the second branch pipe and is perpendicular to the second rear section pipe and the bypass balancing duct, so that the second rear section pipe, the bypass balancing duct and the second front section pipe are T-shaped.

4. The voltage-stabilized and high-efficiency condensation absorption demisting device as described in claim 2, wherein, The first branch pipe is inclined at a first angle of less than 90 degrees relative to the bypass balancing duct. The organic waste gas from the light-blocking machine is introduced into the first rear section pipe from the first front section pipe in the direction of flow along the first branch pipe.

5. The voltage-stabilized and high-efficiency condensation absorption demisting device as described in claim 4, wherein, The second branch pipe is inclined at a second angle of less than 90 degrees relative to the bypass balancing duct. The organic waste gas output from the demister is introduced into the second rear section pipe through the second front section pipe in the direction of the flow and then discharged from the exhaust pipe.

6. The voltage-stabilized and high-efficiency condensation absorption demisting device as described in claim 5, wherein, The first angle or the second angle is between 30 degrees and 60 degrees.

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